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  • Secondary ion mass spectrometry  (2)
  • microporosity  (2)
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  • 1
    ISSN: 1432-0630
    Keywords: Ion implantation ; Annealing behaviour ; Secondary ion mass spectrometry
    Source: Springer Online Journal Archives 1860-2000
    Topics: Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics , Physics
    Notes: Abstract The influence of annealing on the concentration profiles of boron implanted into silicon with does of 1014 ions/cm2 up to 1016 ions/cm2 and an energy of 70 keV was studied. The concentration profiles were measured with Secondary Ion Mass Spectrometry (SIMS). The broadening of the concentration profiles during annealing can be described as a superposition of effects resulting from a relatively immobile and a mobile boron fraction. The properties of the immobile boron fraction were studied by measuring the influence of a boron implantation on the distribution of a homogeneous boron background dope. From these experiments it was concluded that the immobile boron fraction consists of boron precipitates. The properties of the mobile fraction were studied from concentration profiles that were obtained after annealing during different periods at the same temperature. It was found that during the initial stage of the annealing process a fast broadening of the profile occurs; this was assumed to be due to an interstitial type boron diffusion. After prolonged annealing the much slower substitutional type diffusion prevails, due to trapping of the interstitial boron atoms by vacancies. The reliability of the SIMS method, as applied to profile measurements, was checked for the high boron doses used in this investigation. Excessive boron precipitates, obtained after annealing of a high dose, such as 1016 ions/cm2 at about 1000°C, appear to give some increase of the ion yield.
    Type of Medium: Electronic Resource
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  • 2
    ISSN: 1432-0630
    Keywords: Ion implantation ; Hall effect measurements ; Secondary ion mass spectrometry
    Source: Springer Online Journal Archives 1860-2000
    Topics: Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics , Physics
    Notes: Abstract The concentration profiles of boron implanted in silicon were measured using secondary ion mass spectrometry. The accompanying charge carrier profiles were determined by Hall-effect sheet-resistivity measurements combined with layer removal by anodic oxidation and etching. From a mutual comparison of these profiles an electrically inactive boron fraction was found to exist in the region of maximum boron concentration. This fraction can be correlated with boron precipitates. In high dose implantations the precipitates still exist after annealing at 1000°C. In the tail of the profile a small electrically inactive boron fraction was observed. This fraction was correlated with fast diffusing non-substitutional boron. Near the surface a charge carrier peak was found that can be correlated with the damage caused by implantation. The interpretation of the observed electrical effects was facilitated by investigations on boron concentration profiles of layers implanted with different doses and annealed in accordance with different time-temperature schedules.
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  • 3
    ISSN: 0044-2313
    Keywords: Vanadium phosphate ; mixed valence compound V4+/V5+ ; microporosity ; disorder ; open framework ; crystal structure ; single crystal X-ray diffraction ; anti-Keggin group ; Chemistry ; Inorganic Chemistry
    Source: Wiley InterScience Backfile Collection 1832-2000
    Topics: Chemistry and Pharmacology
    Description / Table of Contents: Das System Na/V/P/N(C2H5)3/H2O bei 473 K und die neue offene Struktur der Vanadiumphosphat-Phase Nav[((V4-w4+V1+w5+) O9)(PO4)2] · (PO4)x · (OH)y · zH2O (v = 2,8 bis 4,0; w = -0,1 bis 1,1; x = 0 bis 0,2; y = 0 bis 2,1; z = 7 bis 10)Eine Untersuchung des Na/V/P/N(C2H5)3/H2O-Systems bei 473 K unter hydrothermalen Bedingungen ergibt verschiedene Phasen im pH-Bereich von 2,65 bis 12. Bei niedrigen pH-Werten wurde die NaV4+OPO4-Phase erhalten. Im schwach sauren, neutralen und schwach basischen Bereich wurde die Nav[((V4-w4+V1+w5+) O9)(PO4)2] · (PO4)X · (OH)y · zH2O-Phase (oder kurz FVP-1) (mit v = 2.8 bis 4.0, w = -0.1 bis 1.1, x = 0 bis 0.2, y = 0 bis 2.1 and z = 7 bis 10) gefunden. Ihre Kristallstruktur wurde in der Raumgruppe Im3m mit a = 16.025 Å gelöst. Die Kristallstruktur enthält V4+V5+O9(PO4)2-Gruppen, in welchen die Vanadiumatome in quadratisch pyramidaler Koordination mit den Sauerstoffatomen vorliegen. Die Gruppen besitzen die Gestalt einer Pickelhaube, wobei die Spitze die Vanadylgruppe des zentralen V5+ Polyeders ist. Sie sind statistisch um eine Spiegelebene angeordnet und bilden eine V10/2O18/2(PO4)2-Gruppe. Diese sind über die Phosphattetraeder miteinander verknüpft und bilden dabei ein offenes poröses Gerüst, das die Topologie des NbO-Netzes hat. Das Gerüst hat einen freien mittleren Kanaldurchmesser von 4.1 Å und eine Dichte von 10.2 Vanadium- und Phosphatpolyedern pro 1000 Å3. Dieses und zwei verwandte kürzlich gefundene Strukturen sind mikroporöse Gerüste mit der bisher größten gefundenen Porösität. Kein Aluminosilicat oder Aluminophosphat mit einem ähnlich großen Porenanteil ist bisher bekannt geworden. Die FVP-1 Phase kollabiert nicht beim Heizen in Luft bis 523 K und im Vakuum bis 623 K. Sie dehydratisiert und rehydratisiert reversibel. Redoxtitrationen von 19 Proben zeigten, daß das V4+/V5+ Verhältnis zwischen 4.1(2)/0.9(2) un d2.9(2)/2.1(2) variiert. Synthesen mit V25+O5 als Vanadiumquelle ergaben kleinere V4+/V5+ Verhältnisse als solche mit V4+OSO4. Die Tatsache, daß FVP-1 Unordnungserscheinungen zeigt, macht es möglicherweise für katalytische Anwendungen interessant.
    Notes: An examination of the Na/V/P/N(C2H5)3/H2O system at 473 K under hydrothermal conditions yields several different phases in the pH range of 2.65 to 12. At low pH values a NaV4+OPO4 phase was obtained. In the weakly acid, neutral or low basic pH ranges the Nav[((V4-w4+V1+w5+) O9)(PO4)2] · (PO4)x · (OH)y · zH2O (or FVP-1 for short) phase was found (with v = 2.8 to 4.0, w = -0.1 to 1.1, x = 0 to 0.2, y = 0 to 2.1 and z = 7 to 10). Its crystal structure was solved in space group Im3m with a = 16.025 Å. It contains V44+V5+O9(PO4)2 groups in which the vanadium atoms have a square pyramidal coordination of oxygen atoms in the shape of a spiked helmet, where the spike is the vanadyl group of the central V5+ coordination polyhedron. These groups are statistically arranged around a mirror plane yielding an V10/2O18/2(PO4)2 grouping and connect to form an open porous framework by bridging via the phosphate groups following the topology of the NbO type net. The framework has a mean free channel diameter of about 4.1 Å and a density of 10.2 vanadium and phosphorus polyhedra per 1000 Å3. This makes it, together with two other recently found related frameworks, the most open microporous framework described so far. No aluminosilicates or aluminophosphates of similar openness are known. In air the FVP-1 phase does not collapse when heated to 523 K, in vacuum it remains stable to 623 K. It dehydrates and rehydrates reversibly. Redox titrations of 19 samples show that the V4+/V5+ ratios vary from 4.1(2)/0.9(2) to 2.9(2)/2.1(2). Syntheses using V2O5 as a source of vanadium yield samples with lower V4+/V5+ ratios than those based on VOSO4. The fact that FVP-1 displays disorder makes the compound possibly interesting for potential catalytic applications.
    Additional Material: 5 Ill.
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  • 4
    Electronic Resource
    Electronic Resource
    Weinheim : Wiley-Blackwell
    Angewandte Chemie International Edition in English 36 (1997), S. 91-93 
    ISSN: 0570-0833
    Keywords: microporosity ; vanadium ; zeolites ; Chemistry ; General Chemistry
    Source: Wiley InterScience Backfile Collection 1832-2000
    Topics: Chemistry and Pharmacology
    Additional Material: 4 Ill.
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