ISSN:
0142-2421
Keywords:
Chemistry
;
Polymer and Materials Science
Source:
Wiley InterScience Backfile Collection 1832-2000
Topics:
Physics
Notes:
SIMS relative sensitivity factors and detection limits are reported for seventeen elements in epitaxially-grown ZnSe on GaAs, using oxygen and cesium primary ion beams. Analytical considerations necessary for obtaining the lowest detection limits are discussed.
Additional Material:
2 Ill.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1002/sia.740180207
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