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  • Polymer and Materials Science  (65)
  • Inorganic Chemistry  (6)
  • Chemical Engineering  (1)
  • LPCVD  (1)
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Keywords
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  • 1
    Electronic Resource
    Electronic Resource
    Low-Pressure chemical vapour deposition of tantalum pentoxide films for ulsi devices using tantalum pentaethoxide as precursor (1992)
    New York, NY [u.a.] : Wiley-Blackwell
    Advanced Materials for Optics and Electronics 1 (1992), S. 299-308 
    Details
    ISSN: 1057-9257
    Keywords: LPCVD ; Tantalum pentoxide ; High dielectric constant ; ULSI devices ; Chemistry ; Polymer and Materials Science
    Source: Wiley InterScience Backfile Collection 1832-2000
    Topics: Electrical Engineering, Measurement and Control Technology , Physics
    Notes: A laminar flow low-pressure chemical vapour deposition (LPCVD) system (LAM IntegrityTM) has been used to deposit tantalum pentoxide (Ta2O5) from Ta(OEt)5 films in the presence of oxygen (O2) at 470 °C at a typical deposition rate of 4 nm min-1. Uniformities of 〈1.5% (SD 1σ) over a 150 mm silicon substrate were obtained. The layers were annealed under different conditions. It was discovered that the films did not change their stoichiometry as determined by Rutherford backscattering (RBS). The as-deposited films were amorphous but became crystalline (β-Ta2O5) at temperatures 〉 700 °C. The transmission electron microscopy (TEM) results on crystallisation behaviour were supported by X-ray diffraction data. The electrical properties of the Ta2O5 films have been characterised using MIS (metal/insulator/silicon) capacitor structures. Leakage values of 〈10-6 A cm-2 at 6 MV cm-1 equivalent applied electric field and breakdown strengths of 〉7 MV cm-1 at 1.6 μA were obtained for annealed layers. Compound dielectric constants (native silicon oxide thickness of about 2.5 nm plus Ta2O5 of various thicknesses) between 14 and 〉30 have been measured. The electrical properties reveal the potential use of Ta2O5 as a storage capacitor dielectric in 64 and 256 Mbit DRAM (dynamic random access memory) devices.
    Additional Material: 13 Ill.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1002/amo.860010607
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  • 2
    Electronic Resource
    Electronic Resource
    Deposition, annealing and characterisation of high-dielectric-constant metal oxide films (1995)
    New York, NY [u.a.] : Wiley-Blackwell
    Advanced Materials for Optics and Electronics 5 (1995), S. 163-175 
    Details
    ISSN: 1057-9257
    Keywords: ULSI ; high dielectric constant ; metal oxides ; deposition ; annealing ; characterisation ; Chemistry ; Polymer and Materials Science
    Source: Wiley InterScience Backfile Collection 1832-2000
    Topics: Electrical Engineering, Measurement and Control Technology , Physics
    Notes: Flims of metal oxides, such as Ta2O5, Nb2O5, Al2O3, HfO2, ZrO2 and TiO2 have been fabricated by use of different precursor materials, deposition techniques and annealing techniques. Several analytical methods were applied to study the layers. New data of fundamental properties of these metal oxides are reported and related to practical features that are of importance in device design and manufacturing of advanced, highly integrated devices. This overview may facilitate the choice of an optimal combination of precursor material, deposition technique and corresponding annealing procedure for a specific application of these metal oxide films in microelectronics.
    Additional Material: 5 Ill.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1002/amo.860050305
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  • 3
    Electronic Resource
    Electronic Resource
    Sterospecific polymerization with alkali metal organic compounds (1962)
    Stamford, Conn. [u.a.] : Wiley-Blackwell
    Polymer Engineering and Science 2 (1962), S. 105-106 
    Details
    ISSN: 0032-3888
    Keywords: Chemistry ; Chemical Engineering
    Source: Wiley InterScience Backfile Collection 1832-2000
    Topics: Chemistry and Pharmacology , Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics , Physics
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1002/pen.760020209
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  • 4
    Electronic Resource
    Electronic Resource
    Thermal stability of “living” polymer-lithium systems (1972)
    New York, NY [u.a.] : Wiley-Blackwell
    Journal of Applied Polymer Science 16 (1972), S. 3123-3131 
    Details
    ISSN: 0021-8995
    Keywords: Chemistry ; Polymer and Materials Science
    Source: Wiley InterScience Backfile Collection 1832-2000
    Topics: Chemistry and Pharmacology , Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics , Physics
    Notes: The thermal stabilities of polybutadienyllithium, polyisoprenyllithium, and polystyryllithium solutions have been determined in hydrocarbon solvents. Kinetic analysis indicated that a complex mechanism was involved in the thermolysis of polybutadienyllithium. The thermal stability was observed to increase with increasing lithium concentration, suggesting the presence of competitive reactions in addition to the expected elimination of lithium hydride. The thermal stability of the three systems studied was consistent with their reported degrees of association: dimeric polystyryllithium was less stable than tetrameric polyisoprenyllithium or hexameric polybutadienyllithium.
    Additional Material: 7 Ill.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1002/app.1972.070161207
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  • 5
    Electronic Resource
    Electronic Resource
    Thermolytic reactions of polybutadienyllithium (1972)
    New York, NY [u.a.] : Wiley-Blackwell
    Journal of Applied Polymer Science 16 (1972), S. 3133-3144 
    Details
    ISSN: 0021-8995
    Keywords: Chemistry ; Polymer and Materials Science
    Source: Wiley InterScience Backfile Collection 1832-2000
    Topics: Chemistry and Pharmacology , Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics , Physics
    Notes: In addition to the expected elimination of lithium hydride, metalation and addition reactions have been observed as competitive, thermolytic reactions of polybutadienyllithium. The importance of these reactions at temperatures frequently utilized for the polymerization of butadiene was illustrated and the effect of these reactions on the macrostructure of polybutadiene determined.
    Additional Material: 6 Ill.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1002/app.1972.070161208
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  • 6
    Electronic Resource
    Electronic Resource
    Zersetzungsdrücke und Phasengrenzen von NiobnitridenProfessor ALBRECHT RABENAU zum 60. Geburtstage gewidmet. (1983)
    Weinheim : Wiley-Blackwell
    Zeitschrift für anorganische Chemie 507 (1983), S. 127-141 
    Details
    ISSN: 0044-2313
    Keywords: Chemistry ; Inorganic Chemistry
    Source: Wiley InterScience Backfile Collection 1832-2000
    Topics: Chemistry and Pharmacology
    Description / Table of Contents: Dissociation Pressures and Phase Boundaries of Niobium NitridesDissociation pressures of niobium nitrides in the region NbN1.006-NbN0.45 were measured by a thermogravimetric method at temperatures from 1300 to 1800°C. The results enabled us to make statements on the two phase regions η/δ, δ/γ and δ/β and on the homogeneity ranges of the δ and the β phase. Enthalpies of the conversions η → δ, δ → γ, δ(γ) → β, and of the formation of the δ phase were calculated. A partial three dimensional c,p,T diagram and a proposal for a twodimensional c,T diagram of the Nb—N system have been designed.
    Notes: Durch Thermogravimetrie wurden die Zersetzungsdrücke von Niobnitriden im Gebiet NbN1,006 bis NbN0,45 bei Temperaturen zwischen 1300 und 1800°C ermittelt. Es resultieren Aussagen über die Zweiphasengebiete η-/δ-Phase, δ-/γ-Phase und δ-/β-Phase. Die Enthalpien der Umwandlungen η → δ, δ → γ, δ(γ) → β sowie der Bildung der δ-Phase aus den Elementen wurden berechnet. Es wurden ein dreidimensionales c,p, T-Teildiagramm konstruiert und ein Vorschlag für ein zweidimensionales c, T-Diagramm des Nb—N-Systems gemacht.
    Additional Material: 9 Ill.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1002/zaac.19835071216
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  • 7
    Electronic Resource
    Electronic Resource
    Gezielte Präparation von NiobnitridphasenProfessor Günther Rienäcker zum 80. Geburtstage am. 13. Mai 1984 gewidmet (1984)
    Weinheim : Wiley-Blackwell
    Zeitschrift für anorganische Chemie 512 (1984), S. 7-12 
    Details
    ISSN: 0044-2313
    Keywords: Chemistry ; Inorganic Chemistry
    Source: Wiley InterScience Backfile Collection 1832-2000
    Topics: Chemistry and Pharmacology
    Description / Table of Contents: Preparation of Niobium Nitrides with Proposed Composition and StructureSpecial proposed niobium nitrides were prepared by using the predictions of the p, T, c diagram Nb—N recently known in most parts. This phase diagram thus could be confirmed.
    Notes: Durch Ausnutzung des in großen Teilen bekannten p, T, c-Diagramms der Nb—N-Verbindungen wurden gezielt bestimmte Niobnitridphasen dargestellt. Die analytische und röntgenographische Charakterisierung der Produkte wird mit dem Zustandsdiagramm verglichen und bestätigt dies weitgehend.
    Additional Material: 1 Ill.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1002/zaac.19845120502
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  • 8
    Electronic Resource
    Electronic Resource
    Pour le 70e anniversaire de Monsieur le Professeur Charles Sadron (1972)
    New York : Wiley-Blackwell
    Die Makromolekulare Chemie 156 (1972), S. 3-5 
    Details
    ISSN: 0025-116X
    Keywords: Chemistry ; Polymer and Materials Science
    Source: Wiley InterScience Backfile Collection 1832-2000
    Topics: Chemistry and Pharmacology , Physics
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1002/macp.1972.021560101
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  • 9
    Electronic Resource
    Electronic Resource
    Darstellung und eigenschaften von linearen oligourethanen mit phenylendgruppen und von cyclischen oligourethanen aus diäthylenglykol und hexamethylendiisocyanatHerrn Professor Dr. Dr. E. h. FRANZ BROICH mit den besten Wünschen zum 65. Geburtstag gewidmet (1971)
    New York : Wiley-Blackwell
    Die Makromolekulare Chemie 150 (1971), S. 73-94 
    Details
    ISSN: 0025-116X
    Keywords: Chemistry ; Polymer and Materials Science
    Source: Wiley InterScience Backfile Collection 1832-2000
    Topics: Chemistry and Pharmacology , Physics
    Description / Table of Contents: Linear oligourethanes with phenylurethane endgroups and cyclic oligourethanes were prepared from diethylene glycol and hexamethylene diisocyanate. The largest ring synthesized contains seven units of each, i.e., 119 ring atoms, with a molecular weight of 1920.An effective separation of the oligomers was achieved by adsorption column chromatography. An eluting solvent with solvent gradient was applied successfully. Melting points, transitions, long periods, and X-ray diffraction of the oligomers prepared are discussed with regard to their structure.
    Notes: Es wurden lineare Oligourethane mit Phenylendgruppen und cyclische Oligourethane aus Diäthylenglykol und Hexamethylendiisocyanat dargestellt. Der größte bisher isolierte Ring enthält je sieben Grundbausteine und besitzt 119 Ringglieder bei einem Molekulargewicht von 1920.Eine gute Trennung der Oligomeren wurde durch Adsorptionssäulenchromatographie erzielt. Hierbei wurde ein Elutionsmittel mit Lösungsmittelgradient verwendet. Schmelzpunkte, Umwandlungserscheinungen, Langperioden und Weitwinkeldiagramme der Oligomeren werden im Hinblick auf ihre Struktur diskutiert.
    Additional Material: 13 Ill.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1002/macp.1971.021500107
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  • 10
    Electronic Resource
    Electronic Resource
    Principles of gel chromatography and possibilities for its development (1967)
    Weinheim : Wiley-Blackwell
    Angewandte Makromolekulare Chemie 1 (1967), S. 150-173 
    Details
    ISSN: 0003-3146
    Keywords: Chemistry ; Polymer and Materials Science
    Source: Wiley InterScience Backfile Collection 1832-2000
    Topics: Chemistry and Pharmacology , Physics
    Description / Table of Contents: Die Gelchromatographie kann als eine netzwerk-limitierte Verteilung aufgefaßt werden. Dies führt zu dem Schluß, daß keine normierende Eichbezeichnung, zwischen Molekulargewicht und Elutionsvolumen existiert, die ausschließlich, der gelösten Substanz abhängige Parameter enthält.Die Darstellung von Gelen mit unterschiedlicher chemischer Struktur wird be schrieben, und die Möglichkeiten, die Porengröße zu variieren, werden diskutiert. Die Untersuchung des Einflusses der physikalischen und chemischen Struktur auf die Trennung und die Trennleistung zeigte, daß das Elutionsvolumen durch die chemische Natur des Gels beeinflußt wird; die Trennleistung wird hingegen im wesentlichen durch die physikalische Struktur bestimmt.
    Notes: Gel chromatography can be considered as a network-limited partition. This leads to the conclusion that it is impossible to find a generalizing relationship between the molecular weight and the elution volume using parameters depending only on the solute.The preparation of gels with different chemical structure is discussed and possible methods for the alteration of pore size are described. Investigations of the influence of the physical and chemical structure on separation and separation efficiency have shown that the elution volume depends to some extent on the chemical nature, but the separation efficiency is mainly a function of the physical structure.
    Additional Material: 21 Ill.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1002/apmc.1967.050010110
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