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  • 1
    Electronic Resource
    Electronic Resource
    Long lifetime operation of an ArF-excimer laser (1996)
    Springer
    Applied physics 63 (1996), S. 229-235 
    Details
    ISSN: 1432-0649
    Keywords: PACS: 42.55
    Source: Springer Online Journal Archives 1860-2000
    Topics: Physics
    Notes: Abstract.  An experimental investigation to improve the lifetime of a discharge-excited ArF-excimer laser is presented. The three dominant factors restricting its lifetime are CF4 generation in the laser gas, color-center formation in the optics and input power density reduction due to electrode ablation. Copper electrodes were superior to nickel electrodes in regard to electrode ablation. A gas lifetime of more than 109 shots (about one month at 400 Hz) is shown for an ArF-excimer laser with a liquid-nitrogen trap and high-temperature zirconium alloy trap.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1007/BF01833791
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  • 2
    Electronic Resource
    Electronic Resource
    Gas contaminant effect in a discharge-excited ArF excimer laser (1998)
    Springer
    Applied physics 66 (1998), S. 579-583 
    Details
    ISSN: 1432-0649
    Keywords: PACS: 42.55
    Source: Springer Online Journal Archives 1860-2000
    Topics: Physics
    Notes: 4 , O2 and N2 in a discharge-excited ArF-excimer laser. Measured characteristics include laser pulse energy, small-signal gain, and laser spectrum. Measurement results indicate that laser pulse energy degradation for such impurities (〈100 ppm) is mainly due to optical absorption. It has also been found that for O2 contaminants laser pulse energy degradation is strongly dependent on operational repetition rates; at higher repetition rates, an increased concentration of O2 impurities results in a reduced small-signal gain and a consequent decline in laser pulse energy.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1007/s003400050438
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    Paper (German National Licenses)
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