ISSN:
1434-6079
Keywords:
PACS: 36.40.Qv Stability and fragmentation of clusters – 36.40.Wa Charged clusters – 61.46.+w Clusters, nanoparticles, and nanocrystalline materials
Source:
Springer Online Journal Archives 1860-2000
Topics:
Physics
Notes:
Abstract. We have investigated formation characteristics of stable hydrogenated Si cluster ions, Si n H x +, for deposition on solid substrates. The Si n H x + clusters were grown from silane gas in an ion trap developed for cluster growth, and transported to the solid substrate through an electrostatic quadrupole deflector. Several kinds of the clusters (n=4-10) were grown and transported to the solid substrate. Among them, Si6H13 + had the largest population under the optimized conditions. When the Si6H13 + cluster ion beam was focused to less than 3 mm in diameter on the solid substrate with a deposition energy of 3 eV/Si atom, the beam current obtained was more than 30 pA, which is in the range useful for observation of cluster adsorption structures on solid surfaces.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1007/s100530050502
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