ALBERT

All Library Books, journals and Electronic Records Telegrafenberg

X
feed icon rss

Your email was sent successfully. Check your inbox.

An error occurred while sending the email. Please try again.

Proceed reservation?

Export
Filter
  • Life and Medical Sciences  (2)
  • Wiley-Blackwell  (2)
  • Blackwell Publishing Ltd
  • American Chemical Society
  • 1
    Electronic Resource
    Electronic Resource
    Bioberuf (1998)
    Weinheim : Wiley-Blackwell
    Biologie in unserer Zeit 28 (1998), S. 165-166 
    Details
    ISSN: 0045-205X
    Keywords: Life and Medical Sciences
    Source: Wiley InterScience Backfile Collection 1832-2000
    Topics: Biology
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1002/biuz.960280307
    Location Call Number Expected Availability
    BibTip Others were also interested in ...
    Paper (German National Licenses)
    Fulltext
  • 2
    Electronic Resource
    Electronic Resource
    Preparation of cross-sectional transmission electron microscopy samples by electron beam lithography and reactive ion etching (1989)
    New York, NY : Wiley-Blackwell
    Journal of Electron Microscopy Technique 11 (1989), S. 62-69 
    Details
    ISSN: 0741-0581
    Keywords: TEM sample preparation ; VLSI ; semiconductor processing ; Defect analysis ; Life and Medical Sciences ; Cell & Developmental Biology
    Source: Wiley InterScience Backfile Collection 1832-2000
    Topics: Natural Sciences in General
    Notes: A cross-sectional sample preparation technique is described that relies on lithographic and dry-etching processing, thus avoiding metallographic polishing and ion milling. The method is capable of producing cross-sectional transmission electron microscopy samples with a large amount of transparent area (1 μm × 2.5 mm) which allows the examination of many patterned test sites on the same sample from the same chip of a silicon wafer. An example of the application of the technique is given for localized oxidation through a mask.
    Additional Material: 10 Ill.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1002/jemt.1060110108
    Location Call Number Expected Availability
    BibTip Others were also interested in ...
    Paper (German National Licenses)
    Fulltext
Close ⊗
This website uses cookies and the analysis tool Matomo. More information can be found here...