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  • 1
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    Etching Integrated Circuits (1983)
    In:  Other Sources
    Details
    Publication Date: 2019-06-28
    Description: 20-page report reviews methods available for etching specific layers on wafers and discusses automation techniques and features on one particular automated system. Compares two major etching methods, chemical (wet) and plasma (dry), and discusses areas in need of development. Methods covered include "dip-and-dunk" manual method of chemical etching, automated chemical etching, and plasma etching.
    Keywords: FABRICATION TECHNOLOGY
    Type: MFS-25661 , NASA Tech Briefs (ISSN 0145-319X); 7; 1; P. 108
    Format: text
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    NASA TECHNICAL REPORTS
  • 2
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    Xenon spallation systematics in Angra dos Reis (1981)
    In:  Other Sources
    Details
    Publication Date: 2019-06-28
    Description: Literature Xe data for the Angra dos Reis meteorite have been resolved into constituent spallation, fission and trapped components. The spallation Xe compositions vary over a range wider than observed in any other samples, including lunar samples. These variations are due to the mixing of spallation Xe from Ba and rare earth element targets. It is possible to infer the Ba and rare earth spallation Xe compositions. Angra dos Reis spallation Xe compositions are systematically different from those observed in lunar samples, possibly because of differences in the irradiation conditions (geometry and shielding). Thus the Angra dos Reis data appear to be superior to lunar data for predicting spallation Xe compositions in other meteorites.
    Keywords: LUNAR AND PLANETARY EXPLORATION
    Type: Geochimica et Cosmochimica Acta; 45; Oct. 198
    Format: text
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    NASA TECHNICAL REPORTS
  • 3
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    Automatic chemical vapor deposition (1981)
    In:  Other Sources
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    Publication Date: 2019-06-28
    Description: Report reviews chemical vapor deposition (CVD) for processing integrated circuits and describes fully automatic machine for CVD. CVD proceeds at relatively low temperature, allows wide choice of film compositions (including graded or abruptly changing compositions), and deposits uniform films of controllable thickness at fairly high growth rate. Report gives overview of hardware, reactants, and temperature ranges used with CVD machine.
    Keywords: FABRICATION TECHNOLOGY
    Type: MFS-25249 , NASA Tech Briefs (ISSN 0145-319X); 5; 3; P. 393
    Format: text
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    NASA TECHNICAL REPORTS
  • 4
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    An automated oxide and diffusion facility for IC's (1980)
    In:  Other Sources
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    Publication Date: 2019-06-28
    Description: Report discusses totally-automated oxidation and diffusion facility for fabricating IC's. Several innovations are demonstrated: process controller specifically designed for semiconductor processing; automatic loading system to accept wafers from air track, insert them in quartz carrier, and place carrier on paddle for insertion into furnace; automatic unloading of wafers back onto air track; and boron diffusion using diborane.
    Keywords: FABRICATION TECHNOLOGY
    Type: MFS-25357 , NASA Tech Briefs (ISSN 0145-319X); 5; 2; P. 246
    Format: text
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    NASA TECHNICAL REPORTS
  • 5
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    An automated photolithography facility for IC's (1980)
    In:  Other Sources
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    Publication Date: 2019-06-28
    Description: Report discusses subsystems that will constitute fully-automated photolithography facility for IC's. Facility being developed at Marshall Space Flight Center will produce ultrareliable IC's with minimal human intervention.
    Keywords: FABRICATION TECHNOLOGY
    Type: MFS-25073 , NASA Tech Briefs (ISSN 0145-319X); 5; 1; P. 116
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  • 6
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    Automated ion implantation for IC's (1980)
    In:  Other Sources
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    Publication Date: 2019-06-28
    Description: Report discusses automated ion-implantation facility under development at Marshall Space Flight Center. Facility will produce ultra-reliable IC's with minimal human intervention.
    Keywords: FABRICATION TECHNOLOGY
    Type: MFS-25193 , NASA Tech Briefs (ISSN 0145-319X); 5; 1; P. 115
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  • 7
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    Argon ages for lunar breccias 14064 and 15405 (1978)
    In:  Other Sources
    Details
    Publication Date: 2019-07-13
    Keywords: LUNAR AND PLANETARY EXPLORATION
    Type: Lunar and Planetary Science Conference; Mar 13, 1978 - Mar 17, 1978; Houston, TX
    Format: text
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  • 8
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    The excess fission xenon problem in lunar samples (1976)
    In:  Other Sources
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    Publication Date: 2019-07-13
    Description: This paper presents noble-gas (neon, krypton, and xenon) data obtained in stepwise heating of five lunar breccias: 14063, 14082, 15205, 15405, and 15445. These data are discussed in terms of spallation gas content, cosmic-ray exposure ages, and content of fission xenon. None of these samples is rich in solar-wind gases, and none contains more fission xenon than would be expected for in situ fission of U-238 and Pu-244. The essential features of the excess-fission-xenon phenomenon seen in several Apollo 14 samples are reviewed, as are models which might account for this phenomenon and criteria by which these models may be evaluated. The lack of excess fission xenon in 14063 and 14082 eliminates models relying on microscale xenon redistribution. A model is proposed in which the excess fission xenon originates in local material and percolates through and is adsorbed on regolith material.
    Keywords: LUNAR AND PLANETARY EXPLORATION
    Type: Lunar Science Conference; Mar 15, 1976 - Mar 19, 1976; Houston, TX
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    NASA TECHNICAL REPORTS
  • 9
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    I-129/I-127 variations among enstatite chondrites (1988)
    In:  Other Sources
    Details
    Publication Date: 2019-07-12
    Description: The iodine isotopic compositions and corresponding I-Xe ages were obtained for eight enstatite chondrites, bringing the total number of enstatite chondrites examined by the I-Xe technique to 11. Iodine isotopic compositions of these 11 chondrites indicate a well-defined hiatus correlated with the hiatus in chemical composition defining the two distinct enstatite groups: EH(4,5) and EL(6). Judging by the I-129/I-127 ratios and assuming that both the EH and EL groups originated from a reservoir with a uniform initial iodine isotopic composition, the EH(4,5) chondrites were estimated to be about 4 mln older than the El chondrites.
    Keywords: LUNAR AND PLANETARY EXPLORATION
    Type: Geochimica et Cosmochimica Acta (ISSN 0016-7037); 52; 101-111
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    NASA TECHNICAL REPORTS
  • 10
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    Fission xenon in troctolite 76535 (1980)
    In:  Other Sources
    Details
    Publication Date: 2019-07-13
    Description: Xenon released in stepwise heating of troctolite 76535 shows remarkable similarity to that from the gas-rich breccias. The low temperature fractions are highly enriched in fissiogenic xenon from Pu-244. Although the quantity of fission xenon is not inconsistent with reported age data, release patterns demonstrate that this component is not due to in situ decay. However, in contrast with the gas-rich breccias, the parentless radionuclear component in 76535 is not accompanied by solar wind xenon. Mechanisms for the emplacement of this component in 76535 cannot, therefore, involve exposure on the lunar surface but most likely involve adsorption along intergranular boundaries or thermally driven redistribution. The fact that xenon released from a gas-poor igneous cumulate can mimic that from gas-rich breccias, except for the presence of solar wind xenon in the latter, suggests that direct exposure to space is not required for the incorporation of these weakly bound, surface-correlated, parentless radionuclear components in lunar samples.
    Keywords: LUNAR AND PLANETARY EXPLORATION
    Type: Conference on the Lunar Highlands Crust; Nov 14, 1979 - Nov 16, 1979; Houston, TX
    Format: text
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