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  • ELECTRONICS AND ELECTRICAL ENGINEERING  (1)
  • GEOPHYSICS  (1)
  • 1975-1979  (2)
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Year
  • 1
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    Unknown
    Thermally grown oxide and diffusions for automatic processing of integrated circuits (1979)
    In:  CASI
    Details
    Publication Date: 2019-06-28
    Description: A totally automated facility for semiconductor oxidation and diffusion was developed using a state-of-the-art diffusion furnace and high temperature grown oxides. Major innovations include: (1) a process controller specifically for semiconductor processing; (2) an automatic loading system to accept wafers from an air track, insert them into a quartz carrier and then place the carrier on a paddle for insertion into the furnace; (3) automatic unloading of the wafers back onto the air track, and (4) boron diffusion using diborane with plus or minus 5 percent uniformity. Processes demonstrated include Wet and dry oxidation for general use and for gate oxide, boron diffusion, phosphorous diffusion, and sintering.
    Keywords: ELECTRONICS AND ELECTRICAL ENGINEERING
    Type: NASA-TM-78247
    Format: application/pdf
    Location Call Number Expected Availability
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    NASA TECHNICAL REPORTS
  • 2
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    Unknown
    Intercalibration of airglow observatories with the Atmosphere Explorer satellite (1977)
    In:  Other Sources
    Details
    Publication Date: 2019-06-27
    Description: The visible airglow photometer on the Atmosphere Explorer C satellite has been used to compare the calibrations of a number of ground-based airglow observatories. Discrepancies between different ground stations as large as a factor of six have been revealed. Efforts to account for these discrepancies have resulted in the discovery of differences as large as a factor of two in the standard light sources in use at different observatories. The participation of additional observatories in the intercomparison of standard sources is solicited. The project has also led to the discovery of a source of error that can amount to another factor of two in the procedure used to calibrate many airglow instruments. In the course of the project, detailed maps based on satellite data have been made of the galactic and zodiacal-light background at a number of wavelengths, and a substantial source of contaminating emission has been discovered in the satellite data. The contamination appears to result from interaction of the spacecraft and the atmosphere at altitudes below 170 km.
    Keywords: GEOPHYSICS
    Type: Planetary and Space Science; 25; Feb. 197
    Format: text
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    NASA TECHNICAL REPORTS
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