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Depth-profiling of Cu-Ni sandwich samples by secondary ion mass spectrometry (1975)

Hofer, W. O. ; Liebl, H.

Springer

Applied physics 8 (1975), S. 359-360

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ISSN: 1432-0630

Keywords: Secondary ion mass spectrometry ; Depth profiling ; Surface topography

Source: Springer Online Journal Archives 1860-2000

Topics: Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics , Physics

Notes: Abstract SIMS depth profiles of copper-nickel thin film targets were measured with argon and nitrogen primary ions. While pronounced cone formation is observed in case of argon irradiation the erosion is much more uniform with nitrogen projectiles, probably due to formation of nitride surface layers.

Type of Medium: Electronic Resource

URL: http://dx.doi.org/10.1007/BF00898370

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