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  • 1
    Electronic Resource
    Electronic Resource
    A round robin test of energies and chemical effects of Auger spectra from Fe, Ni and Al metals and their oxidized surfaces (1993)
    Chichester [u.a.] : Wiley-Blackwell
    Surface and Interface Analysis 20 (1993), S. 10-14 
    Details
    ISSN: 0142-2421
    Keywords: Chemistry ; Polymer and Materials Science
    Source: Wiley InterScience Backfile Collection 1832-2000
    Topics: Physics
    Notes: Auger spectra were measured using different pieces of the same specimen of Au, Fe, Ni, Al and their oxides by eight participating laboratories. The following points were found: by adjusting the specimen position with respect to the cylindrical mirror analyser using the elastic peak. Auger peak energy values obtained with each instrument were almost identical; Auger line shapes varied from instrument to instrument and from one operating condition to another; the variation of intensity ratio of LVV to LMM of Fe, Ni and their oxidized surfaces may be employed to identify chemical states.
    Additional Material: 9 Ill.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1002/sia.740200103
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  • 2
    Electronic Resource
    Electronic Resource
    Quantitative trace analysis by non-resonant laser post-ionization (1991)
    Chichester [u.a.] : Wiley-Blackwell
    Surface and Interface Analysis 17 (1991), S. 773-778 
    Details
    ISSN: 0142-2421
    Keywords: Chemistry ; Polymer and Materials Science
    Source: Wiley InterScience Backfile Collection 1832-2000
    Topics: Physics
    Notes: In order to overcome the poor quantitativeness of conventional SIMS, sputtered neutral mass spectrometry (SNMS) employing non-resonant laser post-resonant laser post-ionization has been studied. By studied. By combining a time-of-flight (TOF) analyzer with a powerful excimer laser, it was confirmed that non-resonant laser post-ionization is capable of quantitative analysis of impurities at the pm level. On comparing laser wavelengths, 193 nm (ArF) gave a higher post-ionization efficiency than 248 nm (KrF). It was also demonstrated that the electronegative element sulphur can be detected as positive ions by post-ionization. Furthermore, surface metallic contaminants in a small area (250 μm square) could be determined down to 1011 atoms cm-2.
    Additional Material: 6 Ill.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1002/sia.740171105
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  • 3
    Electronic Resource
    Electronic Resource
    Surface analysis by sputtered neutral mass spectrometry with electron-beam-excited plasma (1989)
    Chichester [u.a.] : Wiley-Blackwell
    Surface and Interface Analysis 14 (1989), S. 595-597 
    Details
    ISSN: 0142-2421
    Keywords: Chemistry ; Polymer and Materials Science
    Source: Wiley InterScience Backfile Collection 1832-2000
    Topics: Physics
    Notes: A new type of sputtered neutral mass spectrometer, named SNART (Sputtered Neutral Analysis - Riken Type), was evaluated. SNART uses an argon plasma that is driven by an electron beam. The plasma is used for both sputtering of the sample and post-ionizing the sputtered neutral atoms. A depth profile of multilayered Ge/Si was taken by SNART to evaluate depth resolution. The quantitativeness of SNART was also checked using a stainless-steel sample. The results were compared with those by conventional SIMS and glow discharge optical emission spectrometry. The following features of SNART were confirmed: (1) high post-ionization efficiency; (2) high depth resolution; (3) high sputtering rate; (4) no matrix effect on post-ionization efficiency; and (5) high quantitativeness.
    Additional Material: 5 Ill.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1002/sia.740141006
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