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  • 1
    ISSN: 0948-1907
    Keywords: Boron carbonitride ; PACVD ; Pyridine-borane ; AES ; XPS ; Chemistry ; Polymer and Materials Science
    Source: Wiley InterScience Backfile Collection 1832-2000
    Topics: Chemistry and Pharmacology , Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
    Notes: This work investigates the influence of the carrier gases N2, Ar, and He and the influence of the applied power density (about 1-4 W/cm2) on the chemical composition of boron carbonitride films deposited by a PACVD process. The plasma is activated via 13.56 MHz radio frequency. Si(100) wafers were used as substrates and pyridine-borane (PB) and triazaborabicyclodecane (TBBD) as B-C-N-forming single-source precursors. Films that were either deposited in He using a low power density or in N2 using a high power density showed comparable properties. Analysis of these films showed their chemical composition to be BC4N. Moreover, they exhibited outstanding hardnesses of up to 64 GPa. A simple model describing the acceleration of B, C, and N ions in the plasma towards the substrate showed comparable ion momenta by use of the corresponding deposition parameters. Basically, it was found that, the higher the ion momentum, the higher the film hardness.
    Additional Material: 5 Ill.
    Type of Medium: Electronic Resource
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  • 2
    Electronic Resource
    Electronic Resource
    Weinheim : Wiley-Blackwell
    Chemie Ingenieur Technik - CIT 71 (1999), S. 86-89 
    ISSN: 0009-286X
    Keywords: Chemistry ; Industrial Chemistry
    Source: Wiley InterScience Backfile Collection 1832-2000
    Topics: Chemistry and Pharmacology , Process Engineering, Biotechnology, Nutrition Technology
    Additional Material: 4 Ill.
    Type of Medium: Electronic Resource
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  • 3
    Electronic Resource
    Electronic Resource
    Weinheim : Wiley-Blackwell
    Zeitschrift für anorganische Chemie 623 (1997), S. 1163-1167 
    ISSN: 0044-2313
    Keywords: Titanium-Aluminium Alkoxide ; Aluminium Titanate (Tialite) ; Ceramics Precursor ; X-Ray Structure Determination ; 1H/13C-NMR (2 D) ; Chemistry ; Inorganic Chemistry
    Source: Wiley InterScience Backfile Collection 1832-2000
    Topics: Chemistry and Pharmacology
    Description / Table of Contents: Synthesis and Structural Characterization of a Novel Titanium-Aluminium AlkoxideThe novel Ti-Al-Alkoxide TiAl2(OiPr)10, was synthesized from aluminium turnings and titanium tetraisopropoxide in 2-propanol and isolated by subsequent fractionating distillation. Colourless prismatic crystals precipitated after 24 h at 20°C from the main fraction. They proved very moisture sensitive. The compound crystallizes in the monoclinc space group C2/c (no. 15) with a = 2303.1(4), b = 1097.2(3), c = 1685.0(3) pm, β = 104.32(1)° and Z = 4. The molecular structure exhibits a bent Al-Ti-Al′ unit, in which Al shows tetrahedral, but Ti octahedral1 coordination. The polyhedra are connected via cis-edges of the octahedron. The structure of the compound in solution was determined by NMR spectroscopy (1H, 13C, COSY) and proved to be identical to the structure in the solid state.
    Notes: Das neue Ti-Al-Alkoxid TiAl2(OiPr)10 wurde durch Umsetzung von Al-Spänen mit Titantetraisopropoxid in Isopropanol und anschließender fraktionierender Destillation dargestellt. Die nach 24 h bei 20°C aus der Hauptfraktion gebildeten farblosen, prismatischen Kristalle sind sehr hydrolyseempfindlich. Die Kristallstruktur konnte bei -83°C bestimmt werden: monokline Raumgruppe C2/c (Nr. 15) mit a = 2303,1(4), b = 1097,2(3), c = 1685,0(3) pm, β = 104,32(1)° und Z = 4. Die Molekülstruktur besteht aus einer gewinkelten Al-Ti-Al′-Einheit, in der Al tetraedrisch und Ti oktaedrisch koordiniert sind. Die verknüpfenden Kanten am Ti-Oktaeder sind cis angeordnet. Die Struktur der Verbindung in Lösung wurde NMR-spektroskopisch (1H, 13C, COSY) ermittelt und stimmt mit der Struktur im Einkristall überein.
    Additional Material: 1 Ill.
    Type of Medium: Electronic Resource
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