ISSN:
0032-3888
Keywords:
Chemistry
;
Chemical Engineering
Source:
Wiley InterScience Backfile Collection 1832-2000
Topics:
Chemistry and Pharmacology
,
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
,
Physics
Notes:
Thermally-reacted poly(methacrylamide) degrades under high-energy irradiation. It has a sensitivity of 2-3 × 10-7 C/cm2 when exposed to 10 KV electrons. The resist is thermally stable to 330°C and has a high glass transition temperature, 180 200°C. It may be used for the lift-off process and ion-milling.
Additional Material:
11 Ill.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1002/pen.760170616
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