ISSN:
0570-0833
Keywords:
aluminum compounds
;
chemical vapor deposition
;
gallium compounds
;
CVD precursors
;
Chemistry
;
General Chemistry
Source:
Wiley InterScience Backfile Collection 1832-2000
Topics:
Chemistry and Pharmacology
Additional Material:
2 Ill.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1002/anie.199604241
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