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  • 1
    Electronic Resource
    Electronic Resource
    High-resolution detection of defects by one dimensional spatial filtering (1979)
    Springer
    Applied physics 18 (1979), S. 363-373 
    Details
    ISSN: 1432-0630
    Keywords: 42.30 ; 42.80 ; 85
    Source: Springer Online Journal Archives 1860-2000
    Topics: Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics , Physics
    Notes: Abstract The capabilities of a one-dimensional filtering method for the detection of defects in periodic structures are derived by a detailed theoretical analysis. The signal-to-noise ratio is evaluated as a function of system parameters and a way is described to overcome the disturbing effect of phase defects. Finally, an extremely simple system is described which demonstrated the detection of defects below 2 μm. This demonstrated detection capability was limited by the available test mask and not by the detection system.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1007/BF00899690
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