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  • 81.15  (1)
  • 2005-2009
  • 1990-1994  (1)
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  • 2005-2009
  • 1990-1994  (1)
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  • 1
    Electronic Resource
    Electronic Resource
    Laser photolytic deposition of molybdenum and tungsten thin film microstructures (1990)
    Springer
    Applied physics 50 (1990), S. 233-235 
    Details
    ISSN: 1432-0630
    Keywords: 81.15 ; 82.50
    Source: Springer Online Journal Archives 1860-2000
    Topics: Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics , Physics
    Notes: Abstract We have deposited thin metal films of Mo and W with sub-μm lateral resolution using the photodissociation of the carbonyls by the frequency doubled radiation of an Arion laser at cw and ps-pulse operation, respectively. In both regimes similar curves are obtained for the intensity dependence of the deposition rate. No difference was observed for the lateral resolution using cw or ps-pulse irradiation. Measurements of the deposition rate as a function of the spot size indicate that the decomposition occurs in the adsorbed phase.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1007/BF00343423
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