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  • 1
    Electronic Resource
    Electronic Resource
    On the chemical sputtering of oxygen-exposed molybdenum (1986)
    Springer
    Applied physics 40 (1986), S. 197-202 
    Details
    ISSN: 1432-0630
    Keywords: 79.20.Nc ; 68.90.+g
    Source: Springer Online Journal Archives 1860-2000
    Topics: Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics , Physics
    Notes: Abstract The sputtering of oxygen-exposed molybdenum was studied by means of mass analysis of emitted neutral and charged particles. The irradiation was performed with 8 keV Ar+ ions at temperatures of 25° and 485°C. It was found that the enhanced sputtering yield at elevated temperature during oxygen exposure is due to beam-induced desorption of MoO2 and cascade sputtering of MoO. At this temperature considerable oxygen incorporation also takes place owing to recoil mixing and diffusion.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1007/BF00616594
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  • 2
    Electronic Resource
    Electronic Resource
    Analysis of solids by secondary ion and sputtered neutral mass spectrometry (1985)
    Springer
    Applied physics 37 (1985), S. 211-220 
    Details
    ISSN: 1432-0630
    Keywords: 79.20.Nc ; 07.75.+h
    Source: Springer Online Journal Archives 1860-2000
    Topics: Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics , Physics
    Notes: Abstract A mass spectrometer is described, which allows the analysis of sputtered neutral and charged particles as well as of residual gas composition. This combined SIMS, SNMS, and RGA instrument consists of a scanning primary ion beam column, an electron impact ionizer, an electrostatic energy filter and an rf quadrupole mass analyzer. Various examples of surface and bulk analysis are presented which demonstrate the beneficial complementary features of these techniques. These are, in particular: a substantial reduction of the matrix effect and fewer complications with samples of low electrical conductivity in SNMS, and the possibility of measuring the depth distribution of gases included in small cavities in the solid in the SNMS/RGA mode. SIMS, on the other hand, allows in many cases higher detection sensitivities.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1007/BF00614819
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  • 3
    Electronic Resource
    Electronic Resource
    The emission of neutral clusters in sputtering (1989)
    Springer
    Applied physics 48 (1989), S. 261-271 
    Details
    ISSN: 1432-0630
    Keywords: 79.20.Nc ; 36.40.+d
    Source: Springer Online Journal Archives 1860-2000
    Topics: Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics , Physics
    Notes: Abstract The mass, angle, and energy resolved emission of neutral clusters in sputtering was studied for a variety of metals and semiconductors. The main phenomena and results are the following: (i) Cluster emission from a series of transition metals reveals a prominent contribution of clusters to the total flux of ejected particles but there is no simple scaling of cluster intensities with the average sputtering yields. With increasing number of constituents, relative intensities of neutral clusters decrease much faster than those of secondary-ion clusters. (ii) The relative intensities of clusters emitted from amorphous and crystalline semiconductors are identical, but the energy spectra of Ge n -clusters (n = 1–4) sputtered from Ge (111) peak at a slightly higher energy (1 eV) as compared to spectra taken from amorphous Ge. The intensities of all Ge n -clusters exhibit the same dependence on emission angle; this holds for both the amorphous and crystalline Ge-sample. (iii) The flux of neutral monomers, dimers, and trimers sputtered from Cu(111), Ni(111), and Ag(111) crystals shows a pronouncedly anisotropic emission along the 〈110〉 lattice directions which is ascribed to a momentum alignment in the anisotropic part of the collision cascade. Energy spectra taken along 〈110〉 peak at higher energies than those obtained from a random emission angle.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1007/BF00619396
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