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  • 1
    Electronic Resource
    Electronic Resource
    On the chemical sputtering of oxygen-exposed molybdenum (1986)
    Springer
    Applied physics 40 (1986), S. 197-202 
    Details
    ISSN: 1432-0630
    Keywords: 79.20.Nc ; 68.90.+g
    Source: Springer Online Journal Archives 1860-2000
    Topics: Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics , Physics
    Notes: Abstract The sputtering of oxygen-exposed molybdenum was studied by means of mass analysis of emitted neutral and charged particles. The irradiation was performed with 8 keV Ar+ ions at temperatures of 25° and 485°C. It was found that the enhanced sputtering yield at elevated temperature during oxygen exposure is due to beam-induced desorption of MoO2 and cascade sputtering of MoO. At this temperature considerable oxygen incorporation also takes place owing to recoil mixing and diffusion.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1007/BF00616594
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