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  • 1
    Electronic Resource
    Electronic Resource
    Long lifetime operation of an ArF-excimer laser (1996)
    Springer
    Applied physics 63 (1996), S. 229-235 
    Details
    ISSN: 1432-0649
    Keywords: 42.55
    Source: Springer Online Journal Archives 1860-2000
    Topics: Physics
    Notes: Abstract An experimental investigation to improve the lifetime of a discharge-excited ArF-excimer laser is presented. The three dominant factors restricting its lifetime are CF4 generation in the laser gas, color-center formation in the optics and input power density reduction due to electrode ablation. Copper electrodes were superior to nickel electrodes in regard to electrode ablation. A gas lifetime of more than 109 shots (about one month at 400 Hz) is shown for an ArF-excimer laser with a liquid-nitrogen trap and high-temperature zirconium alloy trap.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1007/BF01833791
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  • 2
    Electronic Resource
    Electronic Resource
    Continuous operation up to 3 kHz in a discharge-pumped XeCl excimer laser (1996)
    Springer
    Applied physics 63 (1996), S. 1-7 
    Details
    ISSN: 1432-0649
    Keywords: 42.55
    Source: Springer Online Journal Archives 1860-2000
    Topics: Physics
    Notes: Abstract Continuous operations at a high repetition rate up to 3 kHz for discharge-pumped XeCl excimer laser are presented. The dependence of the clearing ratio on laser-gas pressure and input energy densities is studied. It was found that suitable laser-gas pressures minimize the clearing ratio for various input-energy densities. It is also shown that few density disturbances in the discharge region are induced by gas heating in a discharge-pumped XeCl excimer laser with low input-energy density
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1007/BF01112828
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    Paper (German National Licenses)
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