ISSN:
1572-9605
Keywords:
Multilayer
;
thin film
;
infinite layer
;
(Sr, Ca)CuO2
;
(Sr, Ca)RuO3
;
TEM
Source:
Springer Online Journal Archives 1860-2000
Topics:
Electrical Engineering, Measurement and Control Technology
,
Physics
Notes:
Abstract Epitaxial multilayer thin films of “infinite-layer” (Sr, Ca)CuO2 and perovskite (Sr, Ca)RuO3 have been prepared on (100) SrTiO3 substrates by multitarget rf magnetron sputtering. X-ray diffraction analyses revealed that the multilayer structure of (Sr, Ca)CuO3/(Sr, Ca)RuO3 was successfully fabricated with a minimum layer thickness of 20 Å. Transmission electron microscopy measurements of the multilayers indicated that there was no dislocation which normally exists in single-layer films with an infinite-layer structure. Resistivities of multilayer films at room temperature ranged from 1 to 10 mΩ cm and showed semiconductor-like dependence against the temperature.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1007/BF00721655
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