Polymer and Materials Science
Wiley InterScience Backfile Collection 1832-2000
The first stages of oxidation in GaAs(100) have been studied using Auger electron spectroscopy and principal component analysis. We found that at low oxygen exposures (〈104 Langmuirs) and in the presence of excited oxygen produced by electron bombardment, GaAs oxidizes via a one-phase process only. This phase involves the simultaneous oxidation of both the elements Ga and As.
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