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  • 1
    ISSN: 1432-0630
    Keywords: 81.15 ; 82.50
    Source: Springer Online Journal Archives 1860-2000
    Topics: Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics , Physics
    Notes: Abstract We have deposited thin metal films of Mo and W with sub-μm lateral resolution using the photodissociation of the carbonyls by the frequency doubled radiation of an Arion laser at cw and ps-pulse operation, respectively. In both regimes similar curves are obtained for the intensity dependence of the deposition rate. No difference was observed for the lateral resolution using cw or ps-pulse irradiation. Measurements of the deposition rate as a function of the spot size indicate that the decomposition occurs in the adsorbed phase.
    Type of Medium: Electronic Resource
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  • 2
    ISSN: 1432-0649
    Keywords: 82.50 ; 81.15
    Source: Springer Online Journal Archives 1860-2000
    Topics: Physics
    Notes: Abstract We have studied the photolysis of molybdenum hexacarbonyl by focused excimer laser radiation. It was found that electronically excited Mo atoms detected in the focus region of a KrF laser are due to a direct two photon absorption transition. The upper limit of the energy for complete dissociation of Mo(CO)6 has been derived from these results. Two photon dissociation in the gas phase should be the dominant process at metal film deposition on substrates positioned perpendicularly and near to the focus. Adding buffer gases to the organometallic vapor particle formation was observed in the whole irradiated gas volume. The analysis of scattered He-Ne laser light yields information about the density and size of these particles. Some conclusions are drawn with respect to structured metal film deposition with high spatial selectivity.
    Type of Medium: Electronic Resource
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