Publikationsdatum:
2018-10-11
Beschreibung:
Fabrication of buried nanostructures by atomic layer deposition Fabrication of buried nanostructures by atomic layer deposition, Published online: 10 October 2018; doi:10.1038/s41598-018-33036-3 Fabrication of buried nanostructures by atomic layer deposition
Digitale ISSN:
2045-2322
Thema:
Allgemeine Naturwissenschaft
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