ISSN:
1573-7357
Source:
Springer Online Journal Archives 1860-2000
Topics:
Physics
Notes:
Abstract This article reports on the development of a microcalorimeter for X-ray spectroscopy which uses a superconducting kinetic inductance thermometer. The monolithic construction combines the thermometer and all other components on a single substrate. These include a dc SQUID for measuring the thermometer output, and a micromachined “leg and panel” structure for low thermal conductance and capacitance. An all-niobium prototype has been fabricated, and its operation verified qualitatively above 4 K.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1007/BF00693428
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