ISSN:
1432-0630
Keywords:
PACS: 81.05.Gc; 78.55.-m; 61.43.Dq
Source:
Springer Online Journal Archives 1860-2000
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
,
Physics
Notes:
Abstract. Thin layers of hydrogenated amorphous carbon were prepared by using organic hydrocarbon source, xylene (C8H10), in plasma-enhanced chemical vapor deposition (PECVD) system. The microstructures were characterized by using Fourier-transform infrared and Raman scattering spectra. The appearance of a sharp vibration signal in 1600 cm-1 strongly suggests the existence of sp2 carbon clusters with aromatic rings. With increasing the deposition rf power, the content of these aromatic structures is increased in the films. In contrast to a broad single PL peak in methane (CH4)-baseda-C:H films, the PL band of xylene-based a-C:H films contains multiple peaks in blue-green light region, which is influenced by rf power. We tentatively attributed it to the radiative recombination of electron-hole pairs through some luminescent centers associated with aromatic structures.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1007/s003390000576
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