ISSN:
1573-4803
Source:
Springer Online Journal Archives 1860-2000
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
Notes:
Abstract YBa2Cu3O7 (YBCO) superconducting thin films have been grown in situ on single-crystal (1 0 0) MgO substrates by single target d.c. sputtering or laser ablation. The films were highly textured, with full c-axis orientation, as shown by standard θ–2θ X-ray diffractometry. The inplane structure of the films was characterized by reflection high energy electron diffraction (RHEED), oscillating single-crystal photographs, Rutherford backscattering spectrometry (RBS) and by electron channelling patterns (ECP). According to the results obtained from all these methods the films were found to be single-crystal-like. Channelling RBS experiments were carried out in order to provide additional information on the crystal quality, quantitatively evaluated from the χmin values:for samples deposited in optimized conditions, we have found these values on sputtered films as well as on laser ablated films deposited on (1 0 0) MgO substrates to be close to that of the virgin substrate. These values strongly depend on the deposition temperature, in good agreement with ECP data. On the other hand, RBS analysis gives access to the composition of the thin films and in addition the in-depth homogeneity in composition was checked by secondary ion mass spectrometry (SIMS).
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1007/BF00361158
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