Publication Date:
2018-01-26
Description:
A carbon nanotube (CNT) possesses various benefits as a field electron emitter. Multi-walled CNT (MWNT) have exhibited high brightness and the field emission (FE) current is stable even under poor high-vacuum condition of 10 −6 – 10 −7 Pa without ion pumping. In this study, we have experimentally manufactured a compact composite field emission scanning electron microscope (FE-SEM) and X-ray microscope (XRM) with a single isolated MWNT electron source. An electron beam from a MWNT was focussed and accelerated by a Butler electrostatic lens. Stable SEM images were observed at a Butler voltage V but = 1.5 kV and accelerating voltage V acc ≃ 15 kV with a focussed probe current I foc = 61 pA. The spatial resolution of the SEM, which was estimated from 80 – 20 % edge profile of polystyrene latex spheres, was about 9 nm. XRM images were acquired by 30-min exposure at V but = 1.5 kV and V ...
Print ISSN:
1757-8981
Electronic ISSN:
1757-899X
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
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