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High current O+ ion source : Proceedings of fifth international conference on ion sources (1994)

Chen, Y. G. ; Zhou, D. Q. ; Luo, Z. X.

[S.l.] : American Institute of Physics (AIP)

Review of Scientific Instruments 65 (1994), S. 1325-1326

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ISSN: 1089-7623

Source: AIP Digital Archive

Topics: Physics , Electrical Engineering, Measurement and Control Technology

Notes: A high current O+ ion source is desirable for applications to SIMOX and materials modification. To meet the requirements of this field, a new type of nonfilament high current O+ ion source has been developed successfully in our institute. Using O2 as discharge material, the typical extraction characteristics are as follows: The total oxygen ions current is 100 mA, of which the content of O+ is 80%, beam current density is larger than 200 mA/cm2 when the power consumption is 100 W; therefore the economic property is 1 mA/W. Feeding N2, the total extraction beam current is 100 mA of which 70% is N+ while the power consumption is 135 W.

Type of Medium: Electronic Resource

URL: http://dx.doi.org/10.1063/1.1144999

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