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  • 1
    Electronic Resource
    Electronic Resource
    Controllable pulse duration of a XeCl laser (1994)
    [S.l.] : American Institute of Physics (AIP)
    Review of Scientific Instruments 65 (1994), S. 3634-3638 
    Details
    ISSN: 1089-7623
    Source: AIP Digital Archive
    Topics: Physics , Electrical Engineering, Measurement and Control Technology
    Notes: Long optical pulses have been generated in a XeCl excimer laser by using a simple capacitor-transfer discharge circuit consisting of storage capacitors charged at 26 kV and discharged through the electrodes, tightly coupled to the variable small peaking capacitors. By adjusting the [HCl] concentration and capacitance ratios, the typical pulse duration (20 ns) is stretched up to 150 ns (full width at half-maximum). The transfer behaviors of the pulse duration from short pulse to long pulse are presented and analyzed extensively by measuring the discharge voltage profile, output energy, overall efficiency, optical waveform, and pulse duration, as functions of [HCl] concentration and capacitance ratios. © 1994 American Institute of Physics.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.1144484
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    The radio-frequency fluctuation effect on the floating harmonic method (2016)
    American Institute of Physics (AIP)
    Details
    Publication Date: 2016-08-13
    Description: The radio-frequency (RF) plasma diagnostics with an electrical probe facing a challenge, because the RF fluctuation oscillates the plasma potential and distorts the current-voltage (I-V) curve. As Langmuir probe is widely used in plasma diagnostics, many researchers have been studying the effect of RF fluctuation on probe and compensation methods. On the other hand, there have not been enough studies on the fluctuation effect on the floating harmonic method. Therefore, we investigated the impact of RF fluctuation on the floating harmonic method theoretically and experimentally. When the electrons are in ideal Maxwellian distribution, the floating potential is negatively shifted by the RF fluctuation, but the fluctuation does not distort I-V curve around the floating potential. However, in practical plasmas, the I-V curve and their harmonic components are distorted. This RF fluctuation effect becomes more significant in a low density plasma with a high impedance sheath. The second harmonic current decreases with the RF fluctuation while the first harmonic current is merely affected. Therefore, the electron temperatures measured with the floating harmonic method under low density plasma with uncompensated probe are overestimated than the results obtained with the compensated probe.
    Print ISSN: 1070-664X
    Electronic ISSN: 1089-7674
    Topics: Physics
    Published by American Institute of Physics (AIP)
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  • 3
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    Pulsed plasma measurement method using harmonic analysis (2015)
    American Institute of Physics (AIP)
    Details
    Publication Date: 2015-06-26
    Description: A phase delay harmonic analysis method (PDHAM) with high-time resolution is proposed to measure the plasma parameters of the pulsed plasmas. The PDHAM, which is based on the floating harmonic method, applies the phase delayed voltages to a probe tip, and obtains each of the currents in the phase-domain at a given time. The time resolution of this method is 0.8  μ s, and the total measurement is done within 2 s in the case of a pulsed plasma with a frequency of 1 kHz. The measurement result of the plasma parameters was compared with a conventional Langmuir probe using a boxcar mode, and shows good agreements. Because this PDHAM can measure the plasma parameters even in the processing discharges, it is expected to be usefully applied to plasma diagnostics for pulsed processing plasmas.
    Print ISSN: 0021-8979
    Electronic ISSN: 1089-7550
    Topics: Physics
    Published by American Institute of Physics (AIP)
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  • 4
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    Power dependence of electron density at various pressures in inductively coupled plasmas (2014)
    American Institute of Physics (AIP)
    Details
    Publication Date: 2014-11-12
    Description: Experimental observation of the electron density variation in inductively coupled plasmas with the electron energy probability function (EEPFs) was performed at various gas pressures at two RF powers (25 W and 200 W). The measured EEPFs at high power discharges (200 W) showed a Maxwellian distribution, while evolution of the EEPFs from a bi-Maxwellian distribution to a Druyvesteyn-like distribution was observed at low RF powers (25 W) with increasing pressure. A discrepancy of the electron density variation between the two RF powers was observed. This difference is explained by the modified collisional loss and the Bohm velocity from the EEPF of the bi-Maxwellian distribution and the Druyvesteyn–like distribution.
    Print ISSN: 1070-664X
    Electronic ISSN: 1089-7674
    Topics: Physics
    Published by American Institute of Physics (AIP)
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