ISSN:
1089-7623
Source:
AIP Digital Archive
Topics:
Physics
,
Electrical Engineering, Measurement and Control Technology
Notes:
The guidance characteristics of three different translation stages for application as the driver in a high precision displacement transducer calibration instrument (measuring laser) were assessed. A high voltage PZT tube, a low voltage three-segment PZT, and a corrugated diaphragm displacement device with a magnetic coil drive were investigated. The maximum yaw and pitch angles of the PZT tube were 8 and 5′′, respectively, for a translation of 3 μm. The maximum guiding deviation of the three-segment PZT for a displacement of 13 μm was 38′′ (yaw) and 17′′ (pitch) when applying the same voltage to all segments. The maximum guiding deviation, however, was able to be reduced to ±0.4′′ by applying different voltages to individual PZT segments. The guiding deviation of a corrugated diaphragm with a magnetic coil drive was ±0.6′′ (yaw) and ±0.4′′ (pitch) for a displacement of ±100 μm. The corrected three-segment PZT as well as the corrugated diaphragm device are suited for application with the measuring laser of this article. © 1997 American Institute of Physics.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.1148219
Permalink
