ISSN:
1089-7623
Source:
AIP Digital Archive
Topics:
Physics
,
Electrical Engineering, Measurement and Control Technology
Notes:
e-beam evaporation is accompanied by production of a significant ionic component, which is a result of interaction of electrons with residual gas atoms as well as vapor atoms. In this study we show that the interaction of primary beam electrons with vapor atoms can be controlled to a certain extent by choosing the correct magnetic lens current. This technique can be used to reduce or enhance the extent of ionization depending upon the application.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.1140660
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