ISSN:
0142-2421
Keywords:
Chemistry
;
Polymer and Materials Science
Source:
Wiley InterScience Backfile Collection 1832-2000
Topics:
Physics
Notes:
Specimen modification in secondary ion microanalysis caused by oxygen primary ion bombardment has been studied for pure elements. The steady-state primary ion implantation volumes in Al, Si. Fe, Nb, Mo, Ta, and W could be analysed by scanning Auger microanalysis depth profiling, transmission electron microscopy, and electron diffraction imaging. The specimen region modified by the primary ions is found to consist of a metal-oxide phase mixture of various degrees of microcrystallinity, involving amorphous components, too. Whereas chemical state is represented by equilibrium compounds the lattice structure can be of metastable or quasi-equilibrium configuration.
Additional Material:
15 Ill.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1002/sia.740100805
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