ISSN:
1588-2780
Source:
Springer Online Journal Archives 1860-2000
Topics:
Chemistry and Pharmacology
,
Energy, Environment Protection, Nuclear Power Engineering
Notes:
Abstract Silicon nitride hard coatings on tool steel produced by ion beam mixing following sputter or vapour deposition were investigated by RBS and Vickers microhardness measurements. Atomic mixing in the coating/steel interface region resulting in an improved adhesion and in a significant increase of the microhardness of the surface layers was found. Ion beam mixing with gas ions and high fluences leads to blistering of the implanted atoms in the silicon nitride layer.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1007/BF02037778
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