ISSN:
0032-3888
Keywords:
Chemistry
;
Chemical Engineering
Source:
Wiley InterScience Backfile Collection 1832-2000
Topics:
Chemistry and Pharmacology
,
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
,
Physics
Notes:
Poly(lactam thioether) was synthesized from tetrahydro-1,4-thiazepine-5(4H)-one by a ring opening reaction under various conditions and was evaluated as positive electron beam(EB) resist. It was found that poly(lactam thioether) was easily decomposed by EB irradiation. The decomposition by EB exposure may be attributed to cleavage of C—S bonds in the polymer chains. The sensitivity of poly(lactam thioether) was influenced by prebake temperature, molecular weight, and developer, a high sensitivity of 5.3 × 10-6 coulomb/cm2 was observed with a good resolution of less than 1 μm. Poly(lactam thioether) showed a high sensitivity and a high resolution, and is suitable as a positive EB resist.
Additional Material:
8 Ill.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1002/pen.760261002
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