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  • American Institute of Physics (AIP)  (1)
  • Wiley-Blackwell  (1)
  • 1985-1989  (2)
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Year
  • 1
    Electronic Resource
    Electronic Resource
    Study of molybdenum-aluminum interdiffusion kinetics and contact resistance for VLSI applications (1985)
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 58 (1985), S. 4598-4604 
    Details
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: Interdiffusion barrier characteristics of molybdenum thin film with aluminum-1% Si is studied between 733 and 763 K via sheet and contact resistance measurements, Rutherford backscattering spectrometry, secondary ion mass spectrometry, and x-ray diffraction analysis. The results indicate that thermal annealing of Mo/Al-1% Si thin film couples leads to MoAl12 compound formation initially as a nonplanar front, but extensive annealing results in complete transformation of Al-1% Si to MoAl12 and a significant increase in contact resistance. The interdiffusion kinetics is diffusion controlled and shows parabolic time dependence, incubation periods, and extremely high activation energy value of 5.9 eV. The incubation periods and an high activation energy values are explained by the presence of silicon precipitates at the Mo/Al-1% Si interface. Implications of these observations to VLSI device characteristics are discussed and a safe time-temperature processing regime is proposed.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.336227
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  • 2
    Electronic Resource
    Electronic Resource
    The interaction of shock waves in cylindrical structures (1987)
    New York, NY : Wiley-Blackwell
    Plant/Operations Progress 6 (1987), S. 52-56 
    Details
    ISSN: 0278-4513
    Keywords: Chemistry ; Chemical Engineering
    Source: Wiley InterScience Backfile Collection 1832-2000
    Topics: Chemistry and Pharmacology , Process Engineering, Biotechnology, Nutrition Technology
    Notes: An experimental investigation into the validity and use of the hydraulic jump analogy for studying the interaction of shock waves in air with cylindrical structures.
    Additional Material: 9 Ill.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1002/prsb.720060113
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