Electronic Resource
[S.l.]
:
American Institute of Physics (AIP)
Journal of Applied Physics
62 (1987), S. 4872-4877
ISSN:
1089-7550
Source:
AIP Digital Archive
Topics:
Physics
Notes:
Earlier studies of photoresist by the low-loss electron method are extended in three ways. First, more work has been done on the imaging of fine details on the surface of a poorly conducting, low-density specimen. Second, the method has been applied to show the surface of a self-supported membrane. Finally, it has been found that the low-loss image (especially when used at low magnifications) can show the roughness of a flat surface.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.338993
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