ISSN:
1573-4803
Source:
Springer Online Journal Archives 1860-2000
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
Notes:
Abstract The aim of this work is to chemically etch AT wafers of berlinite AIPO4 in sulphuric acid solutions in order to reach a thickness previously chosen (manufacturing of high frequency plate resonators). The kinetics of etching is studied: the decrease of thickness is followed by frequency measurement. The influence of temperature and acid concentration is measured and the evolution of surface texture is checked both by roughness measurements, resonance frequency and scanning electron microscopy methods.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1007/BF00588326
Permalink