ISSN:
0049-8246
Keywords:
Chemistry
;
Analytical Chemistry and Spectroscopy
Source:
Wiley InterScience Backfile Collection 1832-2000
Topics:
Physics
Notes:
A new correction method for obtaining quantitative electron probe microanalysis results is described. It utilizes data provided by Monte Carlo simulations and tracer measurements to obtain a detailed picture of the way in which the x-ray emission process is influenced by the relevant experimental parameters. Then empirical equations are derived which model the intensity of x-ray emission for an extremely wide range of experimental conditions, encompassing electron beam energies from 5 to 40 keV, characteristic x-ray wavelengths from 11.4 to 0.08 nm, angles of electron incidence from 90° to 40° and elements ranging from beryllium to uranium in the Periodic Table. The method treats separately, as with the traditional approach, the effects of atomic number difference in specimen and standard, x-ray absorption and x-ray fluorescence. The correction method was tested on an extensive range of microanalysis data and shown to work well under all conditions, providing chemical compositions which are accutate to within a few percent relative. The capability of handling ultra-light element (beryllium to sodium) analysis is particularly impressive and the r.m.s. error of 3.8% for carbon analysis on carbides is very close to the errors incurred in measuring actual x-ray intensities. The correction program is currently being developed for commercial use on IBM-compatible computers and the final stage in the evolution of the universal correction will be to extend it to deal with the analysis of thin surface films.
Additional Material:
5 Ill.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1002/xrs.1300210109
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