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  • 1
    Electronic Resource
    Electronic Resource
    A two-dimensional model of laser ablation of frozen Cl2: A possible neutral beam source for etching applications (1996)
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 80 (1996), S. 1146-1155 
    Details
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: Charge damage considerations are prompting the development of neutral beam sources for etching applications. Anisotropic etching with hyperthermal Cl2 and SF6 beams has been demonstrated. We describe a two-dimensional plasma chemistry fluid model of laser ablation of frozen Cl2 in vacuum as a neutral beam source. In this scheme an externally applied electric field would be used to enhance the dissociation rate of Cl2 potentially providing an enhanced Cl content in the beam for a greater etch rate. Laser ablation generated neutral beams also may contain a desirable and controllable ion content which may be used to further enhance the etch rate. Limitations of the concept are discussed. © 1996 American Institute of Physics.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.362852
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  • 2
    Electronic Resource
    Electronic Resource
    Simulations of step responses of electronegative radio-frequency capacitively coupled discharges (1998)
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 84 (1998), S. 1848-1858 
    Details
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: The transient response of electronegative radio-frequency glow discharges is important for process control, charge free etching, and highly selective etch applications. The step response of typical electronegative process gases (silane at 1 Torr and chlorine at 100 mTorr) is studied using a drift-diffusion model for silane and a three-moment model for chlorine. The silane simulations include a blocking capacitor whereas the chlorine results do not. For the silane results with a blocking capacitor in series with the plasma, it is found that there are three types of transients. Depending on the final steady-state value of the source rf voltage, the step response can be characterized either by smooth transitions in the number densities of species in the discharge from one steady state to the next, temporary extinction of the discharge or a discharge mode characterized by temporary extinction and reignition of the discharge. In the case of silane definite thresholds separate the phenomena. The step response of the chlorine discharges is always characterized by a smooth transition from one steady state to the next. Smooth transitions from one steady state to the next in the case of step decreases in the source voltage are possible since decrease of the negative ion density in the bulk is controlled by ion–ion recombination. It appears that the temporary extinction of the discharge and natural pulsed steady state is the consequence of how the voltage is divided between the gap and the blocking capacitor during the transient and the fact that the attachment coefficient becomes larger than the ionization coefficient at low values of reduced electric field. © 1998 American Institute of Physics.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.368343
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  • 3
    Electronic Resource
    Electronic Resource
    Step responses of radio-frequency capacitively coupled discharges (1997)
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 82 (1997), S. 2093-2105 
    Details
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: Models capturing the periodic steady-state behavior of rf capacitively coupled discharges are now commonplace. New plasma sources have been motivated by selectivity, charge-damage mitigation, and general process control needs in plasma processing of electronic materials. These new sources require models that can accurately capture the transient behavior of the plasma source. Such models are not commonplace because the behavior of transport parameters in transients is still not well understood and because the problem is inherently stiff, i.e., widely disparate time scales are important. In this paper, we present the results of an investigation of the simplest type of transient, known as a step disturbance, in a 2 cm gap parallel-plate argon discharge at 1 Torr. As examples, two classes of step transients are considered: step increases in the peak-to-peak (pp) applied voltage (300 to up to 450 V pp) and step decreases (300 to as low as 150 V pp). The resulting transients are interpreted in terms of time scales representative of electron and ion motion in the sheath, ionization dynamics, and neutral transport processes. The possibility of using these transients as a means of process identification is discussed. © 1997 American Institute of Physics.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.366019
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  • 4
    Electronic Resource
    Electronic Resource
    Contrast mechanisms in scanning ion microscope imaging for metals (1998)
    Woodbury, NY : American Institute of Physics (AIP)
    Applied Physics Letters 73 (1998), S. 611-613 
    Details
    ISSN: 1077-3118
    Source: AIP Digital Archive
    Topics: Physics
    Notes: The contrast of the secondary electron images in scanning ion microscopy (SIM) is compared with that in scanning electron microscopy (SEM) with ultrahigh vacuum for Al, Cu, Ag, and Au metals deposited on the Si(100) clean surface. The order of the secondary electron yields as a function of the atomic number (Z2) for ion bombardment is opposite to that for electron bombardment. The brightness of the secondary electron images observed by a focused Ga+ ion beam at 30 keV decreases with increasing Z2, while that by the electron beam increases with Z2. On the other hand, the order of the total secondary ion yields in SIM increases with Z2. The secondary electron image observed by a focused Ar+-ion beam at 3 keV shows the similar contrast to that of the Ga+-ion beam. The different Z2 dependence of the secondary electron yields between SEM and SIM was quantitatively confirmed by the total secondary electron spectra and is discussed based on the range profile below the surface, and it is concluded that the decrease of the secondary electron yields in SIM is attributed to the increase of the reflected ions at the surface with increasing Z2. © 1998 American Institute of Physics.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.121872
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  • 5
    Electronic Resource
    Electronic Resource
    [(R)-1,2-Bis(allyloxycarbonyl)ethyl]bis(dimethylglyoximato-N,N')[(R)-1-phenylethylamine]cobalt(III) (1996)
    Oxford [u.a.] : International Union of Crystallography (IUCr)
    Acta crystallographica 52 (1996), S. 1086-1089 
    Details
    ISSN: 1600-5759
    Source: Crystallography Journals Online : IUCR Backfile Archive 1948-2001
    Topics: Chemistry and Pharmacology , Geosciences , Physics
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1107/S0108270195014399
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  • 6
    Electronic Resource
    Electronic Resource
    Theoretical study of the deformation densities of d electrons in K2[PdCl6] and K2[PtCl6] crystals (1996)
    Copenhagen : International Union of Crystallography (IUCr)
    Acta crystallographica 52 (1996), S. 251-259 
    Details
    ISSN: 1600-5740
    Source: Crystallography Journals Online : IUCR Backfile Archive 1948-2001
    Topics: Chemistry and Pharmacology , Geosciences , Physics
    Notes: Aspherical distributions of the d electrons in dipotassium palladium hexachloride, K2[PdCl6], and dipotassium platinum hexachloride, K2[PtCl6], crystals were analyzed by theoretical calculations. Hartree–Fock and configuration interaction calculations were performed for [PdCl6]2− and [PtCl6]2− with and without taking into account the Madelung potentials, using a model potential method. The major relativistic effects were incorporated in the model potentials for Pd and Pt. The deformation-density maps calculated were similar to those given by the X-ray diffraction method. The theoretical result suggested that the positive peaks on the threefold axes and the negative peaks on the metal—Cl bond axis correspond to the excess d electrons (4d of Pd and 5d of Pt) in the t2g (dxy, dxz, dyz) orbitals and the electron deficiency in the eg (dz2,dx2−y2) orbitals, respectively. The positive and negative peak heights were calculated to be +1.8 and −0.8 e Å−3 for [PdCl6]2− and +1.2 and −0.6 e Å−3 for [PtCl6]2−. The effective charges and effective radii of Pd and Pt, and the number of electrons in the t2g, eg and t1u orbitals, were calculated by direct integration. The effects of the Madelung potential and electron correlation on the charge distributions of [PdCl6]2− and [PtCl6]2− were also analyzed.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1107/S010876819501202X
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  • 7
    Electronic Resource
    Electronic Resource
    Expression of Saccharomyces adenylate kinase gene in Candida boidinii under the regulation of its alcohol oxidase promoter (1995)
    Springer
    Applied microbiology and biotechnology 42 (1995), S. 860-864 
    Details
    ISSN: 1432-0614
    Source: Springer Online Journal Archives 1860-2000
    Topics: Biology , Process Engineering, Biotechnology, Nutrition Technology
    Notes: Abstract The methylotrophic yeast, Candida boidinii, was investigated as a new efficient host for heterologous gene expression. The Saccharomyces cerevisiae adenylate kinase gene (ADK1) was used as the first example for heterologous enzyme production in C. boidinii. C. boidinii cells were transformed with plasmids harboring the S. cerevisiae ADK1 gene under the alcohol oxidase (C. boidinii AOD1) promoter. The chromosome-integrant strains produced adenylate kinase protein corresponding to 22%–28% of the total soluble proteins in an enzymatically active form. When the three-copy integrative transformant was grown for 60 h on methanol-glycerol medium in a 1.5-l jar fermentor, adenylate kinase was produced intracellularly with a yield of up to 2 g/l culture medium. As the expression of the S. cerevisiae ADK1 in C. boidinii was under similar regulation to that of the C. boidinii AOD1, the previously cloned 1.7-kb AOD1 promoter fragment was proved to harbor sufficient cis elements for AOD1 regulation and found to be an efficient promoter for heterologous gene expression.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1007/BF00191182
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  • 8
    Electronic Resource
    Electronic Resource
    Enzymatic preparation of [1, 3-13C]dihydroxyacetone phosphate from [13C]methanol and hydroxypyruvate using the methanol-assimilating system of methylotrophic yeasts (1995)
    Springer
    Applied microbiology and biotechnology 43 (1995), S. 228-234 
    Details
    ISSN: 1432-0614
    Source: Springer Online Journal Archives 1860-2000
    Topics: Biology , Process Engineering, Biotechnology, Nutrition Technology
    Notes: Abstract Dihydroxyacetoone synthase (EC 2.2.1.3), which is a key enzyme of the C1-compound-assimilating pathway in yeasts, catalyzes transketolation between formaldehyde and hydroxypyruvate, leading to the formation of dihydroxyacetone and CO2. When [13C]formaldehyde was used as a substrate with dihydroxyacytone synthase from Candida boidinii 2201, 13C was confirmed to be incorporated to the C-1 and C-3 positions of dihydroxyacetone, and the 13C content of each carbon (atoms/100 atoms) was estimated to be 50%. [13C]Methanol was also useful for the enrichment of dihydroxyacetone with 13C, when alcohol oxidase from a methylotrophic yeast was added for the conversion of methanol to formaldehyde. A fed-batch reaction with periodic addition of the substrates was required for the accumalation of 13C-labelled dihydroxyacetone at a higher concentration, because the enzyme system was relatively susceptible to the C donor, formaldehyde or methanol. The optimum conditions for the production gave 160mM (14.4 mg/ml) dihydroxyacetone for 180 min; the molar yield relative to methanol added was 80%. Diyhdroxyacetone kinase (EC 2.7.1.29) from methanol-grown Hansenula polymorpha CBS 4732 was a suitable enzyme for the phosphorylation of dihydroxyacytone. The phosphorylation system, comprising of dihydroxyacetone kinase, adenylate kinase, and ATP, could be coupled with the system for dihydroxyacetone production. A fed-batch reaction afforded 185 mM [1, 3-13C]dihydroxyacetone phosphate from [13C]methanol; the molar yield of the ester relative to methanol added was 92.5%
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1007/BF00172817
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  • 9
    Electronic Resource
    Electronic Resource
    Enzymatic preparation of [1, 3-13C]dihydroxyacetone phosphate from [13C]methanol and hydroxypyruvate using the methanol- assimilating system of methylotrophic yeasts (1995)
    Springer
    Applied microbiology and biotechnology 43 (1995), S. 228-234 
    Details
    ISSN: 1432-0614
    Source: Springer Online Journal Archives 1860-2000
    Topics: Biology , Process Engineering, Biotechnology, Nutrition Technology
    Notes: Abstract  Dihydroxyacetone synthase (EC 2.2.1.3), which is a key enzyme of the C1–compound-assimilating pathway in yeasts, catalyzes transketolation between formaldehyde and hydroxypyruvate, leading to the formation of dihydroxyacetone and CO2. When [13C]formaldehyde was used as a substrate with dihydroxyacetone synthase from Candida boidinii 2201, 13C was confirmed to be incorporated to the C-1 and C-3 positions of dihydroxyacetone, and the 13C content of each carbon (atoms/100 atoms) was estimated to be 50%. [13C]Methanol was also useful for the enrichment of dihydroxyacetone with 13C, when alcohol oxidase from a methylotrophic yeast was added for the conversion of methanol to formaldehyde. A fed-batch reaction with periodic addition of the substrates was required for the accumulation of 13C-labelled dihydroxyacetone at a higher concentration, because the enzyme system was relatively susceptible to the C donor, formaldehyde or methanol. The optimum conditions for the production gave 160 mM (14.4 mg/ml) dihydroxyacetone for 180 min; the molar yield relative to methanol added was 80%. Dihydroxyacetone kinase (EC 2.7.1.29) from methanol-grown Hansenula polymorpha CBS 4732 was a suitable enzyme for the phosphorylation of dihydroxyacetone. The phosphorylation system, comprising of dihydroxyacetone kinase, adenylate kinase, and ATP, could be coupled with the system for dihydroxyacetone production. A fed-batch reaction afforded 185 mM [1, 3-13C]dihydroxyacetone phosphate from [13C]methanol; the molar yield of the ester relative to methanol added was 92.5%.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1007/s002530050395
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  • 10
    Electronic Resource
    Electronic Resource
    Expression of Saccharomyces adenylate kinase gene in Candida boidinii under the regulation of its alcohol oxidase promoter (1995)
    Springer
    Applied microbiology and biotechnology 42 (1995), S. 860-864 
    Details
    ISSN: 1432-0614
    Source: Springer Online Journal Archives 1860-2000
    Topics: Biology , Process Engineering, Biotechnology, Nutrition Technology
    Notes: Abstract  The methylotrophic yeast, Candida boidinii, was investigated as a new efficient host for heterologous gene expression. The Saccharomyces cerevisiae adenylate kinase gene (ADK1) was used as the first example for heterologous enzyme production in C. boidinii. C. boidinii cells were transformed with plasmids harboring the S. cerevisiae ADK1 gene under the alcohol oxidase (C. boidinii AOD1) promoter. The chromosome-integrant strains produced adenylate kinase protein corresponding to 22%–28% of the total soluble proteins in an enzymatically active form. When the three-copy integrative transformant was grown for 60 h on methanol-glycerol medium in a 1.5-l jar fermentor, adenylate kinase was produced intracellularly with a yield of up to 2 g/l culture medium. As the expression of the S. cerevisiae ADK1 in C. boidinii was under similar regulation to that of the C. boidinii AOD1, the previously cloned 1.7-kb AOD1 promoter fragment was proved to harbor sufficient cis elements for AOD1 regulation and found to be an efficient promoter for heterologous gene expression.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1007/s002530050343
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