ISSN:
1089-7623
Source:
AIP Digital Archive
Topics:
Physics
,
Electrical Engineering, Measurement and Control Technology
Notes:
Ion beam deceleration characteristics of a newly developed high-current, mass-separated, low-energy ion beam deposition system that utilizes an acceleration-deceleration method was studied. For realizing a high current ion beam of a mA level with energies down to 10 eV, the system developed is provided with a new ion beam deceleration system consisting of three cylindrical electrodes. Computer-simulated ion beam trajectory study indicates that ion beam convergence in the deceleration system required for suppressing the blowup of the ion beam due to the space charge effect depends on the electric potential distribution applied to these three electrodes. An Ar+ ion beam as high as 5.1 mA which is the highest ion current ever reported in the mass-separated, low-energy ion beam deposition system could be obtained at an ion energy of 100 eV under the optimum deceleration condition. Ion energy dependence of the Ar+ ion current at the target showing ion current decrease with the reduced ion energy was investigated utilizing a computer-simulated ion beam trajectory study. © 1996 American Institute of Physics.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.1147132
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