ISSN:
1013-9826
Source:
Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
Notes:
To manufacture the micro parts or micro structures effectively and precisely, a highprecision 3-axis micro milling machine is built. All the three axis are driven by linear piezoelectricultrasonic motors and the slides are supported by cross-roller guide. Investigations are firstly madeto analyze the impact of the non-linear characteristics in the servo mechanism on the performanceof the servo system. To achieve the positioning and tracking accuracy at sub-micrometer andmicrometer level respectively, on one hand, a optical linear encoder with the resolution of 50nm isapplied to close the control loop and a high performance DSP based motion control card is used tocarried out the reference command. On the other hand, sophisticated control and compensationstrategies are also implemented to overcome the non-linear characteristics in the servo system.Positioning and tracking experiments show that, with this well-tuned control system, the positioningand tracking accuracy are ±0.5μm and ±2.4μm respectively. Using this machine, a micro part with5μm thin-walled structure is machined successfully
Type of Medium:
Electronic Resource
URL:
http://www.tib-hannover.de/fulltexts/2011/0528/01/56/transtech_doi~10.4028%252Fwww.scientific.net%252FKEM.364-366.389.pdf
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