Publication Date:
2015-10-10
Description:
The contrasts in backscattered electron (BSE) images, such as topographic, channeling and mean atomic number (Z) contrasts, were investigated quantitatively from the cross section of a heat-treated steel sheet using a scanning electron microscope (SEM). High primary electron energy ( E P ) enhances Z contrast, whereas low E P improves channeling contrast. A high take-off angle ( ; measured from the specimen surface) also enhances Z contrast, whereas low improves channeling contrast. When becomes very low, topographic information is enhanced and superimposed on channeling contrast due to the tilt effect of BSE. The relationship of the behaviors of the Z contrast and the channeling contrast can be understood by the detection ratio of low-loss electrons (LLEs) to the inelastic BSE components emitted from the sample surface; LLEs contribute to channeling contrast, and their ratio increases with decreasing E P and . The systematic results obtained in this study are useful for controlling SEM conditions in order to enhance the target information in BSE images for practical materials of interest.
Print ISSN:
0022-0744
Electronic ISSN:
1477-9986
Topics:
Electrical Engineering, Measurement and Control Technology
,
Natural Sciences in General
,
Physics
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