ISSN:
1432-0630
Keywords:
81.10.D
Source:
Springer Online Journal Archives 1860-2000
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
,
Physics
Notes:
Abstract Liquid phase epitaxy (LPE) is applied to seal small bore-holes (diameter 250–400 μm) in Si crystals by lateral overgrowth. The overgrowth layers have a typical thickness of 20 μm, are mechanically stable and gas-tight. Using Ga as solvent for the LPE process the overgrowth can be performed at temperatures as low as 560°C.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1007/BF00323451
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