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  • Chemical Engineering  (122)
  • Inorganic Chemistry
  • 1980-1984  (183)
  • 1983  (183)
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  • 1980-1984  (183)
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  • 1
    Digitale Medien
    Digitale Medien
    Profile modification of resist patterns in optical lithography (1983)
    Stamford, Conn. [u.a.] : Wiley-Blackwell
    Polymer Engineering and Science 23 (1983), S. 925-930 
    Details
    ISSN: 0032-3888
    Schlagwort(e): Chemistry ; Chemical Engineering
    Quelle: Wiley InterScience Backfile Collection 1832-2000
    Thema: Chemie und Pharmazie , Maschinenbau , Physik
    Notizen: A method is described to modify profiles of resist patterns in novolac and diazo-oxide containing systems. After patterning of the resist, two successive uniform flood exposures are given, one with deep UV (254 nm) at water-free conditions and the next with near UV (λ 〉 300 nm) at normal atmospheric conditions. The profile which results after development is vertical, concave or overhanging depending on flood exposure conditions and development processing. As the method includes a flood near UV exposure at atmospheric conditions the imagewise exposure energy can be reduced to approximately 35 percent of the normal value. Furthermore it gives also the possibility of using the resist as a deep UV resist. Another important implication is that standing wave effects are completely eliminated.
    Zusätzliches Material: 9 Ill.
    Materialart: Digitale Medien
    URL: http://dx.doi.org/10.1002/pen.760231702
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  • 2
    Digitale Medien
    Digitale Medien
    Poly(4-chlorostyrene), a new high contrast negative E-beam resist (1983)
    Stamford, Conn. [u.a.] : Wiley-Blackwell
    Polymer Engineering and Science 23 (1983), S. 1047-1049 
    Details
    ISSN: 0032-3888
    Schlagwort(e): Chemistry ; Chemical Engineering
    Quelle: Wiley InterScience Backfile Collection 1832-2000
    Thema: Chemie und Pharmazie , Maschinenbau , Physik
    Notizen: PCS(poly-4-chlorostyrene) has previously been evaluated as a negative e-beam resist, but although the sensitivity was good [2 to 5μC/square centimeter (cm2)], the contrast (γ) was poor (1.1 to 1.5). Recent experiments have shown that contrast is not only a function of molecular weight distribution (MWD), but can also be affected by polymerization conditios. Among these are: branching, head to head linkages, and oxygen in backbone. PCS was prepared via thermal free radical solution polymerization, and then fractionated by differential solvation techniques. Reactions occurring during polymerization and crosslink formation on irradiation will be discussed. For molecular weights of 700 and 300K respectively (same MWD), the sensitivity was 2 and 5μC/cm2, while the contrast (γ) was 3.5 for both. This is the highest reported contrast for a polymeric negative resist. The resist can then be UV hardened after development, and will not flow at 200°C. The RIE etch rate is ∼1/2 that of PMMA in various plasmas.
    Zusätzliches Material: 5 Ill.
    Materialart: Digitale Medien
    URL: http://dx.doi.org/10.1002/pen.760231814
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  • 3
    Digitale Medien
    Digitale Medien
    Organosilicon polymers for lithographic applications (1983)
    Stamford, Conn. [u.a.] : Wiley-Blackwell
    Polymer Engineering and Science 23 (1983), S. 1054-1058 
    Details
    ISSN: 0032-3888
    Schlagwort(e): Chemistry ; Chemical Engineering
    Quelle: Wiley InterScience Backfile Collection 1832-2000
    Thema: Chemie und Pharmazie , Maschinenbau , Physik
    Notizen: Linear polymers of silicone gums (polysiloxanes) have many attributes that make them attractive for lithographic applications, such as oxidative and thermal stability, good adhesion properties, solubility in common solvents, and resistance to etching in an oxygen plasma. When polysiloxanes are used as the top imaging layer (∼2000Å) in a two-layer resist system, the developed negative siloxane images act as a high resolution etch mask for the oxygen plasma etching of the bottom planarizing polymer layer. Commercially available polysiloxanes have been evaluated for their deep UV sensitivity at 2537Å, and have been found to have very high resolution capabilities (∼0.5μ) and high contrast (γ = 4). The negative images do not swell in the developer, and the line width is therefore independent of development time. The combination of high resolution, sensitivity, and ease of processing make this a simple multilayer system for deep UV and e-beam applications.
    Zusätzliches Material: 11 Ill.
    Materialart: Digitale Medien
    URL: http://dx.doi.org/10.1002/pen.760231816
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  • 4
    Digitale Medien
    Digitale Medien
    Letters to the editor (1983)
    Hoboken, NJ : Wiley-Blackwell
    AIChE Journal 29 (1983), S. 525-526 
    Details
    ISSN: 0001-1541
    Schlagwort(e): Chemistry ; Chemical Engineering
    Quelle: Wiley InterScience Backfile Collection 1832-2000
    Thema: Chemie und Pharmazie , Werkstoffwissenschaften, Fertigungsverfahren, Fertigung
    Materialart: Digitale Medien
    URL: http://dx.doi.org/10.1002/aic.690290332
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  • 5
    Digitale Medien
    Digitale Medien
    Letters to the editor (1983)
    Hoboken, NJ : Wiley-Blackwell
    AIChE Journal 29 (1983), S. 172-173 
    Details
    ISSN: 0001-1541
    Schlagwort(e): Chemistry ; Chemical Engineering
    Quelle: Wiley InterScience Backfile Collection 1832-2000
    Thema: Chemie und Pharmazie , Werkstoffwissenschaften, Fertigungsverfahren, Fertigung
    Materialart: Digitale Medien
    URL: http://dx.doi.org/10.1002/aic.690290130
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  • 6
    Digitale Medien
    Digitale Medien
    Thermal conductivity of plastic foams (1983)
    Stamford, Conn. [u.a.] : Wiley-Blackwell
    Polymer Engineering and Science 23 (1983), S. 293-298 
    Details
    ISSN: 0032-3888
    Schlagwort(e): Chemistry ; Chemical Engineering
    Quelle: Wiley InterScience Backfile Collection 1832-2000
    Thema: Chemie und Pharmazie , Maschinenbau , Physik
    Notizen: A simple equation enabling the prediction of the thermal conductivity of plastic foams, without the aid of adjustable parameters, is proposed. The equation is based on a recurrent method, previously developed, that showed reasonable agreement with experimental results. Ways of decreasing the thermal radiation contribution are shown. In particular, the influence of cell size, radiation transmission through solid membranes, and low-emissivity boundary surfaces are analyzed. Errors involved in steady techniques of measuring the thermal conductivity associated with radiation are discussed.
    Zusätzliches Material: 7 Ill.
    Materialart: Digitale Medien
    URL: http://dx.doi.org/10.1002/pen.760230602
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  • 7
    Digitale Medien
    Digitale Medien
    Plane strain fracture toughness of polyethylene pipe materials (1983)
    Stamford, Conn. [u.a.] : Wiley-Blackwell
    Polymer Engineering and Science 23 (1983), S. 404-411 
    Details
    ISSN: 0032-3888
    Schlagwort(e): Chemistry ; Chemical Engineering
    Quelle: Wiley InterScience Backfile Collection 1832-2000
    Thema: Chemie und Pharmazie , Maschinenbau , Physik
    Notizen: The plane strain fracture toughness of medium density polyethylene pipe materials has been investigated over a range of test temperatures and rates. Conditions are defined under which valid fracture toughness values can be obtained; at higher temperatures the material is notch-insensitive. Fracture surface morphology is described, and features are compared with predictions from the Dugdale model. The toughness derives from a band of fibrillar, drawn morphology associated with crack initiation or slow growth. The plane strain fracture toughness correlates with percent crystallinity according to the same relationship whether the crystallinity is varied by thermal treatment, comonomer content, or molecular weight.
    Zusätzliches Material: 13 Ill.
    Materialart: Digitale Medien
    URL: http://dx.doi.org/10.1002/pen.760230707
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  • 8
    Digitale Medien
    Digitale Medien
    Deformation studies of polystyrene/poly(vinyl methyl ether) blends by mechanical-vibrational spectroscopy (1983)
    Stamford, Conn. [u.a.] : Wiley-Blackwell
    Polymer Engineering and Science 23 (1983), S. 861-868 
    Details
    ISSN: 0032-3888
    Schlagwort(e): Chemistry ; Chemical Engineering
    Quelle: Wiley InterScience Backfile Collection 1832-2000
    Thema: Chemie und Pharmazie , Maschinenbau , Physik
    Notizen: We have analyzed the deformation behavior of compatible and incompatible polystyrene (PS) and poly(vinyl methyl ether) (PVME) blends by a combination of mechanical and vibrational spectroscopy. Macroscopic properties and segmental orientation were found to be sensitive to molecular weight, strain rate, and temperature of measurement above the glass-transition temperature. Considerably different orientation functions were found for the PS and PVME components. For the experiments carried out above the Tg of the blends, the deformation behavior measured was consistent with expectations of a rubbery network.
    Zusätzliches Material: 15 Ill.
    Materialart: Digitale Medien
    URL: http://dx.doi.org/10.1002/pen.760231602
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  • 9
    Digitale Medien
    Digitale Medien
    A comparison of miscible binary blend interaction parameters measured by different methods (1983)
    Stamford, Conn. [u.a.] : Wiley-Blackwell
    Polymer Engineering and Science 23 (1983), S. 676-681 
    Details
    ISSN: 0032-3888
    Schlagwort(e): Chemistry ; Chemical Engineering
    Quelle: Wiley InterScience Backfile Collection 1832-2000
    Thema: Chemie und Pharmazie , Maschinenbau , Physik
    Notizen: Miscible blends of the polyhydroxy ether of bisphenol-A, Phenoxy, with a series of aliphatic polyesters were studied using melting point depression analysis and sorption to obtain the Flory-Huggins polymer-polymer interaction parameter, B. The B values obtained from these measurements were found to agree well in sign, magnitude, and variation with ester repeat structure and to also agree well with B values measured calorimetrically for mixtures of low molecular weight compounds with structures which are analogous to those of the polymers. These comparisons suggest that the same mechanisms are responsible for the exothermic heats of mixing measured directly for the analog compounds and indirectly for the miscible polymer blends. For this general system, evidence is provided which suggests that hydrogen bond formation between the hydroxyl group on Phenoxy and the ester moiety is probably responsible for the exothermic interactions and polymer blend miscibility observed.
    Zusätzliches Material: 6 Ill.
    Materialart: Digitale Medien
    URL: http://dx.doi.org/10.1002/pen.760231207
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  • 10
    Digitale Medien
    Digitale Medien
    High modulus/high strength polyethylene obtained by high-pressure injection molding (1983)
    Stamford, Conn. [u.a.] : Wiley-Blackwell
    Polymer Engineering and Science 23 (1983), S. 869-876 
    Details
    ISSN: 0032-3888
    Schlagwort(e): Chemistry ; Chemical Engineering
    Quelle: Wiley InterScience Backfile Collection 1832-2000
    Thema: Chemie und Pharmazie , Maschinenbau , Physik
    Notizen: Increasing the nominal injection pressure up to 500 MP a improves the mechanical properties (modulus and strength) of injection-molded high-molecular-weight high-density polyethylene substantially. By a proper combination of barrel and mold temperature, the modulus of the molded parts (test bars) may be increased at least eight times compared to parts molded at 100 MPa. This improvement is partly due to the formation of high-strength crystalline modifications of the polyethylene induced by flow and pressure. The extent to which these structure modifications occur in the samples molded at various conditions has been determined by thermal analysis (DTA). When increasing the thickness of the samples, a sharp reduction of the modulus and strength was observed, even though the concentration of the crystalline high-strength phase was higher. An explanation of this effect in terms of the relaxation of the tie-molecules connecting the crystallites is suggested.
    Zusätzliches Material: 11 Ill.
    Materialart: Digitale Medien
    URL: http://dx.doi.org/10.1002/pen.760231603
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