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Structural and tribological properties of cluster-assembled CNx films (2007)

Blomqvist, M. ; Bongiorno, G. ; Podestà, A. ; [et al.]

Springer

In: Applied Physics A: Materials Science and Processing. 2007; 87(4): 767-772. Published 2007 Feb 28. doi: 10.1007/s00339-007-3898-8.

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Publication Date: 2007-02-28

Print ISSN: 0947-8396

Electronic ISSN: 1432-0630

Topics: Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics , Physics

Published by Springer

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Interpretation of TOF–SIMS depth profiles from ultrashallow high-k dielectric stacks assisted by hybrid collisional computer simulation (2005)

Ignatova, V.A. ; Möller, W. ; Conard, T. ; [et al.]

Springer

In: Applied Physics A: Materials Science and Processing. 2005; 81(1): 71-77. Published 2005 Jun 01. doi: 10.1007/s00339-005-3239-8.

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Publication Date: 2005-06-01

Print ISSN: 0947-8396

Electronic ISSN: 1432-0630

Topics: Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics , Physics

Published by Springer

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