ISSN:
1089-7550
Source:
AIP Digital Archive
Topics:
Physics
Notes:
By using a newly designed collimated plasma beam reactor, plasma-enhanced chemical vapor deposition from BCl3+NH3+H2+Ar with the surface irradiated by a 193-nm excimer laser at a pressure of 2.8 Torr and substrate temperatures of 500–900 °C yielded BN films with the following texture as revealed by transmission electron diffractometry (TED), transmission electron microscopy, scanning electron microscopy, and Fourier-transformed infrared spectroscopy: (1) a thin-film part which consists of 10-nm-sized crystallites with a sp2-bonded structure grown on the substrate, namely, a sp2 100 A(ring) layer; (2) polycrystalline parts with cBN or wBN structure, depending on the condition, embedded in a sp2 100 A(ring) layer; (3) crystallites, though found infrequently, grown to be much larger than the sp2 100 A(ring) layer thickness. The TED pattern of the polycrystalline wBN was particularly in agreement with the standard data.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.349789
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