Publication Date:
2015-10-29
Description:
Compact H + ECR ion source using permanent magnets is under development. Switching the hydrogen gas flow in pulse operations can reduce the gas loads to vacuum evacuation systems. A specially designed piezo gas valve chops the gas flow quickly. A 6 GHz ECR ion source equipped with the piezo gas valve is tested. The gas flow was measured by a fast ion gauge and a few ms response time is obtained.
Print ISSN:
0034-6748
Electronic ISSN:
1089-7623
Topics:
Electrical Engineering, Measurement and Control Technology
,
Physics
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