ISSN:
1662-9752
Source:
Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
Notes:
In order to cut the ingots and slabs of the silicon carbide (SiC), we developed the newmethod of electric discharge machining (EDM). EDM is usually used for the machining of themetals, and if it is electric conductive material, it is effective for the machining. However, if theelectrical resistivity of SiC is high, the electric current cannot be large enough for and the EDM,and we failed the machining of SiC. Therefore, we use three methods to keep higher electricconduction. One is photoconductive, the second is high electric field effect and it is calledavalanche effect, and the third is high temperature effect because usually the resistivity is low whenthe semiconductor or insulation materials are in high temperature. Thus, we applied three method,and finally can cut the SiC slabs of the resistivity of the order of 10 Ωm, which is almost 1000 timeshigher than that of the ordinary EDM at least. The flatness of the cutting surface is the same of themetals’ and the cutting rate for the SiC ingots is 10 times higher than that of diamond saw. Thistechnique will be effective for the related materials of SiC, such as diamonds and GaN
Type of Medium:
Electronic Resource
URL:
http://www.tib-hannover.de/fulltexts/2011/0528/02/20/transtech_doi~10.4028%252Fwww.scientific.net%252FMSF.600-603.851.pdf
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