ISSN:
1662-8985
Source:
Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
Notes:
Magnesium oxide (MgO) films are utilized for the anti-plasma sputtering coating withexcellent ability of secondary electron emission in plasma display panels (PDP). These propertiesare degraded by the impurities adsorbed on the film surface. Therefore, we should obtainimpurity-free surface during the PDP manufacturing process. We have synthesized whisker andcontinuous film types of metal oxide using a chemical vapor deposition (CVD) method operatedunder atmosphere. In this study, a temperature programmed desorption method has been applied todetect residual species adsorbed on the surface of the present films in the ultra-high vacuumatmosphere. The amount of water adsorption was determined by this method
Type of Medium:
Electronic Resource
URL:
http://www.tib-hannover.de/fulltexts/2011/0528/01/39/transtech_doi~10.4028%252Fwww.scientific.net%252FAMR.11-12.693.pdf
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