ISSN:
0934-0866
Keywords:
Chemistry
;
Industrial Chemistry and Chemical Engineering
Source:
Wiley InterScience Backfile Collection 1832-2000
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
,
Process Engineering, Biotechnology, Nutrition Technology
Notes:
Characterization of the roughness of surfaces of individual features present in SEM images is obtained from the slope and intercept of a plot of the brightness difference between pixels as a function of their separation distance, in directions parallel and perpendicular to the scan lines within the outlines of the feature. The descriptive names contrast and texture are given to the intercept and slope of this plot, respectively. These parameters can be used to classify features, just as measures of size, shape, etc. are used for selection, distribution plots and statistical comparison. Evidence is also shown for a correlation between the texture and the fractal dimension of the feature profile, and consequently with the surface fractal dimension of the feature.
Additional Material:
3 Ill.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1002/ppsc.19870040106
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