PACS: 81.05.Tp; 82.35+t; 52.75.Rx
Springer Online Journal Archives 1860-2000
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
Abstract. We studied the deposition of C60 polymer films under different Ar plasma conditions. The films were deposited at a pressure range between 1.3 and 40 Pa, and the input power was varied from 10 to 70 W. The films were investigated by Raman spectroscopy to confirm the C-C valence states of the polymeric phases. C60 polymers were formed under various experimental conditions. However, the depositions resulted in non-uniform films consisting of unpolymerized C60, dimers, linear chains and polymeric planes. Amorphous carbon was found in the films deposited at 13 and 20 Pa (50 W input power) and 13 Pa (70 W).
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